On-chip and freestanding elastic carbon films for micro-supercapacitors

P Huang,C Lethien,S Pinaud,K Brousse,R Laloo,V Turq,M Respaud,A Demortière,B Daffos,P L Taberna,B Chaudret,Y Gogotsi,P Simon,P. Huang,C. Lethien,S. Pinaud,K. Brousse,R. Laloo,V. Turq,M. Respaud,A. Demortière,B. Daffos,P. L. Taberna,B. Chaudret,Y. Gogotsi,P. Simon
DOI: https://doi.org/10.1126/science.aad3345
IF: 56.9
2016-02-12
Science
Abstract:Flexible power for flexible electronics A challenge for flexible electronics is to couple devices with power sources that are also flexible. Ideally, they could also be processed in a way that is compatible with current microfabrication technologies. Huang et al. deposited a relatively thick layer of TiC on top of an oxide-coated Si film. After chlorination, most, but importantly not all, of the TiC was converted into a porous carbon film that could be turned into an electrochemical capacitor. The carbon films were highly flexible, and the residual TiC acted as a stress buffer with the underlying Si film. The films could be separated from the Si to form free-floating films, with the TiC providing a support layer. Science , this issue p. 691
multidisciplinary sciences
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