Abstract:Nanophotonic device design aims to optimize photonic structures to meet specific requirements across various applications. Inverse design has unlocked non-intuitive, high-dimensional design spaces, enabling the discovery of high-performance devices beyond heuristic or analytic methods. The adjoint method, which calculates gradients for all variables using just two simulations, enables efficient navigation of this complex space. However, many inverse-designed structures, while numerically plausible, are difficult to fabricate and sensitive to variations, limiting their practical use. The discrete nature with numerous local-optimal structures also pose significant optimization challenges, often causing gradient-based methods to converge on suboptimal designs. In this work, we formulate inverse design as a fabrication-restricted, discrete, probabilistic optimization problem and introduce BOSON-1, an end-to-end, variation-aware subspace optimization framework to address the challenges of manufacturability, robustness, and optimizability. To overcome optimization difficulty, we propose dense target-enhanced gradient flows to mitigate misleading local optima and introduce a conditional subspace optimization strategy to create high-dimensional tunnels to escape local optima. Furthermore, we significantly reduce the runtime associated with optimizing across exponential variation samples through an adaptive sampling-based robust optimization, ensuring both efficiency and variation robustness. On three representative photonic device benchmarks, our proposed inverse design methodology BOSON^-1 delivers fabricable structures and achieves the best convergence and performance under realistic variations, outperforming prior arts with 74.3% post-fabrication performance. We open-source our codes at <a class="link-external link-https" href="https://github.com/ScopeX-ASU/BOSON" rel="external noopener nofollow">this https URL</a>.

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