Abstract:A data-driven framework is presented, that enables the prediction of quantities, either observations or parameters, given sufficient partial data. The framework is illustrated via a computational model of the deposition of Cu in a Chemical Vapor Deposition (CVD) reactor, where the reactor pressure, the deposition temperature and feed mass flow rate are important process parameters that determine the outcome of the process. The sampled observations are high-dimensional vectors containing the outputs of a detailed CFD steady-state model of the process, i.e. the values of velocity, pressure, temperature, and species mass fractions at each point in the discretization. A machine learning workflow is presented, able to predict out-of-sample (a) observations (e.g. mass fraction in the reactor) given process parameters (e.g. inlet temperature); (b) process parameters given observation data; and (c) partial observations (e.g. temperature in the reactor) given other partial observations (e.g. mass fraction in the reactor). The proposed workflow relies on the manifold learning schemes Diffusion Maps and the associated Geometric Harmonics. Diffusion Maps is used for discovering a reduced representation of the available data, and Geometric Harmonics for extending functions defined on the manifold. In our work a special use case of Geometric Harmonics is formulated and implemented, which we call Double Diffusion Maps, to map from the reduced representation back to (partial) observations and process parameters. A comparison of our manifold learning scheme to the traditional Gappy-POD approach is provided: ours can be thought of as a "Gappy DMAP" approach. The presented methodology is easily transferable to application domains beyond reactor engineering.

High-Dimensional Intrinsic Interpolation Using Gaussian Process Regression and Diffusion Maps

Deep Manifold Computing and Visualization

Intrinsic Gaussian Process on Unknown Manifolds with Probabilistic Metrics

Manifold Learning for the Emulation of Spatial Fields from Computational Models.

Implicit Manifold Gaussian Process Regression

Intrinsic Wrapped Gaussian Process Regression Modeling for Manifold-valued Response Variable

Residual Deep Gaussian Processes on Manifolds

Manifold Gaussian Processes for Regression

Scientific Data Interpolation with Low Dimensional Manifold Model

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Intrinsic Gaussian Vector Fields on Manifolds

Manifold Diffusion Geometry: Curvature, Tangent Spaces, and Dimension

Multivariate Gaussian Process Regression for Multiscale Data Assimilation and Uncertainty Reduction

Interactive Pattern Discovery in High-Dimensional, Multimodal Data Using Manifolds

Bayesian Manifold Regression

A Heat Diffusion Perspective on Geodesic Preserving Dimensionality Reduction

Deep Fréchet Regression

Deep Random Features for Scalable Interpolation of Spatiotemporal Data

From partial data to out-of-sample parameter and observation estimation with Diffusion Maps and Geometric Harmonics

Multi-Linear Kernel Regression and Imputation in Data Manifolds

Convergence of Diffusion Models Under the Manifold Hypothesis in High-Dimensions