Waveguide integrated superconducting single-photon detector for on-chip quantum and spectral photonic application

V Kovalyuk,S Ferrari,O Kahl,A Semenov,Yu Lobanov,M Shcherbatenko,A Korneev,W Pernice,G Goltsman
DOI: https://doi.org/10.1088/1742-6596/917/6/062032
2017-11-01
Journal of Physics: Conference Series
Abstract:With use of the travelling-wave geometry approach, integrated superconductor-nanophotonic devices based on silicon nitride nanophotonic waveguide with a superconducting NbN-nanowire suited on top of the waveguide were fabricated. NbN-nanowire was operated as a single-photon counting detector with up to 92 % on-chip detection efficiency in the coherent mode, serving as a highly sensitive IR heterodyne mixer with spectral resolution (f/df) greater than 106 in C-band at 1550 nm wavelength.
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