Spray deposited gallium doped tin oxide thinfilm for acetone sensor application

M. S. Preethi,S. P. Bharath,Kasturi V. Bangera
DOI: https://doi.org/10.1063/1.5029664
2018-01-01
AIP Conference Proceedings
Abstract:Undoped and gallium doped (1 at.%, 2 at.% and 3 at.%) tin oxide thin films were prepared using spray pyrolysis technique by optimising the deposition conditions such as precursor concentration, substrate temperature and spraying rate. X-ray diffraction analysis revealed formation of tetragonally structured polycrystalline films. The SEM micrographs of Ga doped films showed microstructures. The electrical resistivity of the doped films was found to be more than that of the undoped films. The Ga-doped tin oxide thin films were characterised for gas sensors. 1 at.% Ga doped thin films were found to be better acetone gas sensor, showed 68% sensitivity at 350°C temperature.
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