Abstract:Abstract Error compensation has become an important means of improving the manufacturing and processing accuracy of computer numerical control (CNC) machine tools. Quick and precise measurement of the various geometric motion errors (GMEs) of CNC machine tools is crucial. We propose a novel laser method for the efficient and direct high-precision measurement of the 21 GMEs of a three-axis CNC machine tool, or three linear axes of a five-axis tool. A corresponding system was developed, comprising a fiber-coupled laser unit, sensor head, target unit, and beam-steering unit. The beam-steering unit was designed to perform high-accuracy 90° rotation of the measuring beam, and the target unit was designed to be sensitive to 18 GMEs of the three linear axes. Stability, repeatability, and comparison experiments were conducted to verify the performance of the proposed system. The results showed that the stability of the position error measurement is ± 6.3 nm. For straightness error measurement, the stability, repeatability error, and residual are within ± 60.3 nm, ± 0.5 μm, and ± 0.7 μm, respectively. These are within ± 0.12 arcsec, ± 0.5 arcsec, and ± 0.5 arcsec for the pitch and yaw measurements, and within ± 0.37 arcsec, ± 1.5 arcsec, and ± 1.0 arcsec for the roll measurements, respectively. For squareness error measurement, the repeatability error and residual are within ± 0.6 arcsec and ± 1.6 arcsec, respectively. Compared with a laser interferometer, the proposed system can measure the 21 GMEs of a three-axis machine tool with one-step installation. Without accuracy loss, the measurement efficiency is approximately 45 times higher than that of a laser interferometer, thus providing a new quick and accurate measurement method of GMEs and error compensation of CNC machine tools.

Dynamic Measurement of Spindle Errors of CNC Machine Tools by Capacitive Sensors During Aircraft Parts Machining

A T-Type Capacitive Sensor Capable of Measuring5-DOF Error Motions of Precision Spindles.

Nonlinear analysis of cylindrical capacitive sensor used for measuring high precision spindle rotation errors

Research on the Error Measurement and Error Compensation Technology for CNC Machine Tools

Research on the Real-time Measurement for the Thermal Distortion of the Spindle in Machine Tools by Using High Accuracy Displacement Sensor

Full-scale Measurement of CNC Machine Tools

Volumetric Error Modeling And Analysis For Cnc Machine Tool Based On Multi-Body System

Transmission and measurement characteristics evaluation of surface acoustic wave sensor on rotating spindle in machine tools

Fast Detection of Geometric Errors for Three-Axis Machine Tools with Combined Double-Ball Bars Based on Spatial Circle Detection

An efficient method for measuring and identifying geometric and dynamic errors in dual five-axis machine tools

Measurement and Analysis of the Radial Motion Error of Aerostatic Ultra-Precision Spindle

Identification of Kinematic Errors of Five-Axis Machine Tool Trunnion Axis from Finished Test Piece

Influence of machining parameters on dynamic errors in a hexapod machining cell

A High Accuracy Method for the Field Dynamic Balancing of Rigid Spindles in the Ultra-Precision Turning Machine

Analysis of Main Error Sources for the Error Motion Measurement of a Precision Shafting Using a T-Type Capacitive Sensor

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

A sophisticated platform for characterization, monitoring and control of machining

Accuracy of an Electric Spindle

Evaluation of servo, geometric and dynamic error sources on five axis high-speed machine tool

REAL-TIME MEASUREMENT OF MACHINE TOOL TEMPERATURE FIELDS AND THEIR EFFECT ON MACHINING ERRORS

Performance Evaluation of Multi-Axis CNC Machine Tools by Interferometry Principle using Laser Calibration System