Design and performance evaluation of a novel stick–slip piezoelectric linear actuator with a centrosymmetric-type flexure hinge mechanism

Feng Qin,Hu Huang,Jiru Wang,Hongwei Zhao
DOI: https://doi.org/10.1007/s00542-019-04329-y
2019-02-06
Microsystem Technologies
Abstract:A stick–slip actuator with a centrosymmetric type flexure hinge mechanism was presented in this paper. The dimension of the actuator is approximately 83 mm × 82 mm × 19 mm. The positive and the negative motions could be achieved by two piezo stacks and one flexure hinge mechanism. To study the output characteristics, the actuator was fabricated and tested under various experimental conditions. The results showed that the maximum speeds of the positive and negative motions were 2.893 mm/s and 2.747 mm/s respectively, the maximum load was 3.8 N for both the positive and negative motions, the real displacement of a step of the positive and negative motions were 8.367 μm and 8.412 μm. Furthermore, the backward motion of the actuator had been greatly suppressed, which was beneficial to their wide applications in the fields of aerospace, precision-optics, nanomechanics, and so on.
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