Abstract:Aluminum gallium arsenide (AlGaAs) and related III-V semiconductors have excellent optoelectronic properties. They also possess strong material nonlinearity as well as high refractive indices. In view of these properties, AlGaAs is a promising candidate for integrated photonics, including both linear and nonlinear devices, passive and active devices, and associated applications. Low propagation loss is essential for integrated photonics, particularly in nonlinear applications. However, achieving low-loss and high-confinement AlGaAs photonic integrated circuits poses a challenge. Here we show an effective reduction of surface-roughness-induced scattering loss in fully etched high-confinement AlGaAs-on-insulator nanowaveguides by using a heterogeneous wafer-bonding approach and optimizing fabrication techniques. We demonstrate ultrahigh-quality AlGaAs microring resonators and realize quality factors up to 3.52 × 106 and finesses as high as 1.4 × 104. We also show ultra-efficient frequency comb generations in those resonators and achieve record-low threshold powers on the order of ∼20 µW and ∼120 µW for the resonators with 1 THz and 90 GHz free-spectral ranges, respectively. Our result paves the way for the implementation of AlGaAs as a novel integrated material platform specifically for nonlinear photonics and opens a new window for chip-based efficiency-demanding practical applications.

Strong frequency conversion in heterogeneously integrated GaAs resonators

High Efficiency SHG in Heterogenous Integrated GaAs Ring Resonators

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Heterogeneously Integrated GaAs Waveguides on Insulator for Efficient Frequency Conversion

Efficient Second Harmonic Generation in Nanophotonic GaAs-on-insulator Waveguides.

Phase-Matched Second-Harmonic Generation in an On-Chip L i NbO 3 Microresonator

Nonlinear Optics: Heterogeneously Integrated GaAs Waveguides on Insulator for Efficient Frequency Conversion (Laser Photonics Rev. 12(10)/2018)

400%/W second harmonic conversion efficiency in $\mathrm{14 \mu m}$-diameter gallium phosphide-on-oxide resonators

400%/W Second Harmonic Conversion Efficiency in 14 Μm-Diameter Gallium Phosphide-on-oxide Resonators.

Efficient continuous-wave nonlinear frequency conversion in high-Q gallium nitride photonic crystal cavities on silicon

Ultrahigh-Q AlGaAs-on-insulator Microresonators for Integrated Nonlinear Photonics.

Second harmonic generation in gallium phosphide photonic crystal nanocavities with ultralow continuous wave pump power

Integrated GaN photonic circuits on silicon (100) for second harmonic generation

Efficient Second Harmonic Generation in GaAs-on-Insulator Waveguides

Efficient second harmonic generation by harnessing bound states in the continuum in semi-nonlinear etchless lithium niobate waveguides

Second-harmonic Generation in Aluminum Nitride Microrings with 2500%/W Conversion Efficiency

Numerical simulation of efficient second harmonic generation in high-index-contrast AlGaAs microring waveguide by using the discrete method

Efficient Third Harmonic Generation in Composite Aluminum Nitride / Silicon Nitride Microrings

Phase Matched Second Harmonic Generation in an On-Chip Lithium Niobate Microresonator Fabricated by Femtosecond Laser

High Efficiency Second Harmonic Generation in Gallium Phosphide Ring Resonators on Oxide

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces