Abstract:Focused electron beam induced deposition (FEBID) is a single-step, direct-write nanofabrication technique capable of writing three-dimensional metal-containing nanoscale structures on surfaces using electron-induced reactions of organometallic precursors. Currently FEBID is, however, limited in resolution due to deposition outside the area of the primary electron beam and in metal purity due to incomplete precursor decomposition. Both limitations are likely in part caused by reactions of precursor molecules with low-energy (<100 eV) secondary electrons generated by interactions of the primary beam with the substrate. These low-energy electrons are abundant both inside and outside the area of the primary electron beam and are associated with reactions causing incomplete ligand dissociation from FEBID precursors. As it is not possible to directly study the effects of secondary electrons in situ in FEBID, other means must be used to elucidate their role. In this context, gas phase studies can obtain well-resolved information on low-energy electron-induced reactions with FEBID precursors by studying isolated molecules interacting with single electrons of well-defined energy. In contrast, ultra-high vacuum surface studies on adsorbed precursor molecules can provide information on surface speciation and identify species desorbing from a substrate during electron irradiation under conditions more representative of FEBID. Comparing gas phase and surface science studies allows for insight into the primary deposition mechanisms for individual precursors; ideally, this information can be used to design future FEBID precursors and optimize deposition conditions. In this review, we give a summary of different low-energy electron-induced fragmentation processes that can be initiated by the secondary electrons generated in FEBID, specifically, dissociative electron attachment, dissociative ionization, neutral dissociation, and dipolar dissociation, emphasizing the different nature and energy dependence of each process. We then explore the value of studying these processes through comparative gas phase and surface studies for four commonly-used FEBID precursors: MeCpPtMe 3 , Pt(PF 3 ) 4 , Co(CO) 3 NO, and W(CO) 6 . Through these case studies, it is evident that this combination of studies can provide valuable insight into potential mechanisms governing deposit formation in FEBID. Although further experiments and new approaches are needed, these studies are an important stepping-stone toward better understanding the fundamental physics behind the deposition process and establishing design criteria for optimized FEBID precursors.

Dissociative ionization of the potential focused electron beam induced deposition precursor π-allyl ruthenium(II) tricarbonyl bromide, a combined theoretical and experimental study

Gas phase low energy electron induced decomposition of the focused electron beam induced deposition (FEBID) precursor trimethyl (methylcyclopentadienyl) platinum(IV) (MeCpPtMe3)

Focused Electron Beam-Induced Deposition and Post-Growth Purification Using the Heteroleptic Ru Complex (η3-C3H5)Ru(CO)3Br

Collision-induced Dissociation and Photodetachment of Singly and Doubly Charged Anionic Polynuclear Transition Metal Carbonyl Clusters: Ru3Co(CO)13−, Ru6C(CO)162−, and Ru6(CO)182−

Dissociative Photoionization Of 1,3-Butadiene: Experimental And Theoretical Insights

Experimental and Theoretical Study of Photoionization and Photodissociation of Bromoethane

Electron-induced ligand loss from iron tetracarbonyl methyl acrylate

Dissociation of Internal Energy-Selected Methyl Bromide Ion Revealed from Threshold Photoelectron-Photoion Coincidence Velocity Imaging.

Collision-Induced Dissociation and Photodetachment of Singly and Doubly Charged Anionic Polynuclear Transition Metal Carbonyl Clusters: Ru3co(Co)(13)(-), Ru6c(Co)(16)(2-), and Ru-6(Co)(18)(2-)

The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Experimental and Theoretical Study on the Dissociative Photoionization of Methyl Methacrylate

Valence-shell photoelectron circular dichroism of ruthenium(iii)-tris-(acetylacetonato) gas-phase enantiomers

A localized view on molecular dissociation via electron-ion partial covariance

Experimental and theoretical study of the photoionization and dissociative photoionizations of carbon tetrachloride

Experimental and theoretical study of the photoionization and dissociative photoionizations of dichlorodifluoromethane

Dissociative Photoionization of Methyl Crotonate: Experimental and Theoretical Insights

Enhanced strong-field ionization and fragmentation of methanol using non-commensurate fields

Dissociative Photoionization of Methyl Chloride Studied with Threshold Photoelectron-Photoion Coincidence Velocity Imaging.

Ion-momentum imaging of dissociative electron attachment dynamics in acetylene

Structural rearrangements and fragmentation pathways induced by a low-energy electron attachment to ethyl acetate

Enhanced Strong-Field Ionization and Fragmentation of Methanol Using Noncommensurate Fields