Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation

LIU Xiangmei,ZU Ningning,LI Hongying,LI Jingyao,Xiangmei LIU,Ningning ZU,Hongying LI,Jingyao LI
DOI: https://doi.org/10.1088/2058-6272/ab571f
2019-12-19
Plasma Science and Technology
Abstract:Radio-frequency microdischarge in acetylene is investigated by use of a fluid model and an aerosoldynamics model in a cylindrical discharge chamber. In this article, the results at a pressure of100–500 Torr, a voltage of 80–150 V, and an electrode gap of 400–1000 μ m are carefully analyzed anddiscussed. It is shown that two electron heating modes α and γ appear in the microdischarge, and thepressure-dependent transition from α to γ was accompanied by the abrupt decrease of electron densityand electron temperature. The mode transition phenomenon is further confirmed by the variation ofthe electron temperature axial profiles, the profiles vary continuously from a center high at thepressure of 100 Torr to an edge high at the pressure of 500 Torr. Furthermore, in the α mode (100Torr) the plasma density increases linearly with the increase of electrode gap, but decreasessharply with the increase of electrode gap in the γ mode (...
physics, fluids & plasmas
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