Dynamics of a micro-cantilever for capacitive energy harvesting considering nonlinear inertia and curvature

Mahyar Ghavami,Saber Azizi,Mohammad Reza Ghazavi
DOI: https://doi.org/10.1007/s40430-021-03301-0
IF: 2.361
2022-03-10
Journal of the Brazilian Society of Mechanical Sciences and Engineering
Abstract:In this paper, the nonlinear dynamics of a cantilever-based capacitive energy harvesting device with out-of-plane gap closing scheme is investigated under large deformations. The frequency response of the micro-cantilever in these devices exhibits a softening behavior when subjected to large deformations, which can be exploited to increase the operational bandwidth of the device. However, linear beam theories fail to accurately predict the dynamic response of the system due to the nonlinearities induced by these large deformations, which demonstrates the importance of using nonlinear beam theories in design of such systems. Therefore, in this work, the micro-cantilever is modeled continuously based on a nonlinear Euler–Bernoulli beam theory which takes the curvature and inertia nonlinearities into account. The governing electric equation of the device is obtained by employing the Kirchhoff's voltage law in the equivalent electric circuit of the system, which is coupled with the mechanical domain. The coupled nonlinear electro-mechanical equations of the device are discretized using Galerkin technique and are integrated numerically over time. The static and dynamic pull-in instability of the micro-cantilever is studied, and the performance of the device subjected to ambient vibrations is evaluated and analyzed by obtaining the frequency response of the system. In order to harvest the maximum energy in the bi-stable regions of the frequency response, a hoping voltage is introduced to force the system to settle to the steady-state response that has a larger oscillation amplitude.
engineering, mechanical
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