Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Jonas Hafner,Marco Teuschel,Davide Disnan,Michael Schneider,Ulrich Schmid
DOI: https://doi.org/10.1080/21663831.2020.1868593
2021-01-17
Materials Research Letters
Abstract:Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.GRAPHICAL Impact statementThe non-linear nature of the strong electrostrictive effect observed in ferroelectric polymers was used to enhance and control its piezoelectric activity by an electric field. A large and tunable piezoelectric response was verified in polymer-based MEMS resonators, proving the ability to tailor their actuating and sensing properties.
materials science, multidisciplinary
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