On‐Chip Metasurface‐on‐Facets for Ultra‐High Transmission through Waveguides in Near‐Infrared

Eran Falek,Aviad Katiyi,Yakov Greenberg,Alina Karabchevsky

DOI: https://doi.org/10.1002/adom.202100130

IF: 9

2021-04-24

Advanced Optical Materials

Abstract:Nature has long inspired scientists and engineers to develop transparent surfaces via constructing anti‐reflective surfaces. In absence of anti‐reflection (AR) coating, silicon reflects about 35% of light for a single interface air−silicon. Here, inspired by jellyfish anti‐reflective eyes, a man‐made anti‐reflective surface on the facet of the waveguide is proposed and demonstrated for waveguides transparency in near‐infrared. The optimized metamaterial with unit cells of 560 × 560 nm shows transparency of 2.6 times better as compared to the waveguide with blank facet. Metasurfaces are milled on the waveguides facets with a focused ion beam. Silicon‐on‐insulator waveguides are tested with an inline set‐up. Far‐field scattering diagrams reveal that it is the special geometry of the unit cells of the engraved metamaterial, which can be associated with the directional scattering resulting in combined effect: on one hand the ultra‐high transparency of the device and on the other hand the efficient coupling to the low‐order modes due to the focusing dielectric nano‐antennas effect. Reported here waveguide facets as AR metamaterials on a chip, opens up opportunities to engineer transparent on‐chip devices with high coupling efficiency for diverse applications from sensing to quantum technologies.

materials science, multidisciplinary,optics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is achieving an ultra - high transmittance through silicon - based optical waveguides in the near - infrared band. Specifically, since semiconductor materials (such as silicon) have a high refractive index, this leads to inevitable reflection losses at the waveguide end - faces, thereby reducing the transmission efficiency. For example, at a single air - silicon interface, the reflectivity of silicon can be as high as 35%. To reduce these reflection losses and increase the transmittance of the optical waveguide, researchers have proposed various anti - reflection (AR) coatings and metasurface structures. However, the traditional multi - layer AR coating method has limitations such as material selection, manufacturing cost, angle and spectral dependence. In addition, since the waveguide end - face size is usually on the order of micrometers, depositing multi - layer materials on it is not practical.

For this reason, this paper proposes an anti - reflection metasurface structure based on bionic design, that is, etching unit structures with specific geometric shapes on the waveguide end - face to achieve broadband anti - reflection effects. This structure is inspired by the eyes of box jellyfish, which have a unique gradient refractive index structure and can significantly reduce reflection. Through optimized design, this metasurface structure achieves a transmittance 2.6 times higher than that of a blank waveguide in the near - infrared band, thereby increasing the transparency and coupling efficiency of the optical waveguide. This result provides new possibilities for developing on - chip devices with high transmittance and is suitable for a variety of applications from sensing to quantum technology.