Influence of anodization parameters on film thickness and volume expansion of thick- and large-sized anodic aluminum oxide film

Yuanjing Pu,Jiajun Hu,Taicang Yao,Linfeng Li,Jie Zhao,Yu Guo

DOI: https://doi.org/10.1007/s10854-021-05948-w

2021-05-01

Abstract:Anodic aluminum oxide (AAO) film with a thickness ranging from 20 to 100 μm was prepared using a large-sized Al plate (4 cm × 10 cm) to investigate the anodization parameter effect on the film thickness and volume expansion factor. A corrosion treatment (voltage = 0 V) was performed to investigate the film dissolution caused by acid. The actual anode surface temperature was also measured to confirm the field-assisted nature of AAO dissolution. The film thickness increases exponentially with temperature, and increases approximately linearly with voltage, duration or concentration. The volume expansion factor gives a first rising and then falling trend with temperature or duration, while it has a nearly linear trend with voltage or concentration. The volume expansion factor increases with the intensified electric field, while its decrease is attributed to the Joule heat-enhanced dissolution. In the case of large film thickness (> 20 μm), the pore confinement effect may be one of the reasons for the change of volume expansion factor. In addition to the conventional parameters, the heat transfer-related parameters (for example, sample size) also greatly affect the AAO film growth.

engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied