Dynamic piezoelectric MEMS-based optical metasurfaces

Chao Meng,Fei Ding,Jo Gjessing,Martin Thomaschewski,Cuo Wu,Christopher Dirdal,Paul C. V. Thrane,Sergey I. Bozhevolnyi

DOI: https://doi.org/10.1126/sciadv.abg5639

IF: 13.6

2021-06-25

Science Advances

Abstract:Combining piezoelectric MEMS with optical gap-plasmon metasurfaces enables electrically driven dynamic 2D wavefront shaping.

multidisciplinary sciences

What problem does this paper attempt to address?

Dynamic MEMS-based optical metasurfaces

Chao Meng,Paul C. V. Thrane,Fei Ding,Jo Gjessing,Martin Thomaschewski,Cuo Wu,Christopher Dirdal,Sergey I. Bozhevolnyi

DOI: https://doi.org/10.48550/arXiv.2101.08834

2021-01-21

Optics

Abstract:Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale, thus opening fascinating perspectives for next generation ultracompact optical devices and systems. However, to date, most well-established OMSs are static, featuring well-defined optical responses determined by OMS configurations set during their fabrication. Dynamic OMS configurations investigated so far by using controlled constituent materials or geometrical parameters often exhibit specific limitations and reduced reconfigurability. Here, by combining a thin-film piezoelectric micro-electro-mechanical system (MEMS) with a gap-surface plasmon based OMS, we develop an electrically driven dynamic MEMS-OMS platform that offers controllable phase and amplitude modulation of the reflected light by finely actuating the MEMS mirror. Using this platform, we demonstrate MEMS-OMS components for polarization-independent beam steering and two-dimensional focusing with high modulation efficiencies (~ 50%), broadband operation (~ 20% near the operating wavelength of 800 nm) and fast responses (< 0.4 ms). The developed MEMS-OMS platform offers flexible solutions for realizing complex dynamic 2D wavefront manipulations that could be used in reconfigurable and adaptive optical networks and systems.
Plasmon Hybridization Induced by Quasi Bound State in the Continuum of Graphene Metasurfaces Oriented for High-Accuracy Polarization-Insensitive Two-Dimensional Sensors

Xiuyu Wang,Jihong Xin,Qun Ren,Haocheng Cai,Jiaqi Han,Chengyi Tian,Pengcheng Zhang,Lijie Jiang,Zhihao Lan,Jianwei You,Wei E. Sha

DOI: https://doi.org/10.3788/col202220.042201

IF: 2.56

2022-01-01

Chinese Optics Letters

Abstract:Plasmonics could provide compact and powerful solutions for manipulating light in deep-subwavelength dimensions, which is promising for a great range of nanophotonic technologies such as plasmonic rulers and sensors. However, the effective area of enhanced localized field induced by surface plasmon polaritons is typically restricted to the structural boundaries. In this work, we propose a method to generate high quality-factor extended electromagnetic fields via hybridizing the super-radiant state and the quasi bound state in the continuum of graphene metasurfaces. The coupling interaction involved operates as a three-level system with multiple sharp resonances immune to the polarization, which holds great promise for developing nanodevices with high sensing capacity in two dimensions.
MEMS-integrated metasurfaces for dynamic linear polarizers

Yadong Deng,Chao Meng,PAUL THRANE,Sören im Sande,Sergey Bozhevolnyi,Fei Ding,Paul C. V. Thrane,Sergey I. Bozhevolnyi

DOI: https://doi.org/10.1364/optica.515524

IF: 10.4

2024-02-24

Optica

Abstract:Yadong Deng, Chao Meng, Paul C. V. Thrane, Sören im Sande, Sergey I. Bozhevolnyi, Fei Ding Optical metasurfaces (OMSs), planar arrays of meticulously designed meta-atoms, are renowned for remarkable capabilities in manipulating ... [Optica 11, 326-332 (2024)]

optics
Electrically tunable topological phase transition in non-Hermitian optical MEMS metasurfaces

Fei Ding,Yadong Deng,Chao Meng,Paul C V Thrane,Sergey I Bozhevolnyi,Paul C. V. Thrane,Sergey I. Bozhevolnyi

DOI: https://doi.org/10.1126/sciadv.adl4661

IF: 13.6

2024-02-03

Science Advances

Abstract:Exceptional points (EPs), unique junctures in non-Hermitian open systems where eigenvalues and eigenstates simultaneously coalesce, have gained notable attention in photonics because of their enthralling physical principles and unique properties. Nonetheless, the experimental observation of EPs, particularly within the optical domain, has proven rather challenging because of the grueling demand for precise and comprehensive control over the parameter space, further compounded by the necessity for dynamic tunability. Here, we demonstrate the occurrence of optical EPs when operating with an electrically tunable non-Hermitian metasurface platform that synergizes chiral metasurfaces with piezoelectric MEMS mirrors. Moreover, we show that, with a carefully constructed metasurface, a voltage-controlled spectral space can be finely tuned to access not only the chiral EP but also the diabolic point characterized by degenerate eigenvalues and orthogonal eigenstates, thereby allowing for dynamic topological phase transition. Our work paves the way for developing cutting-edge optical devices rooted in EP physics and opening uncharted vistas in dynamic topological photonics.

multidisciplinary sciences
Designing transparent piezoelectric metasurfaces for adaptive optics

Liao Qiao,Xiangyu Gao,Kaile Ren,Chaorui Qiu,Jinfeng Liu,Haonan Jin,Shuxiang Dong,Zhuo Xu,Fei Li

DOI: https://doi.org/10.1038/s41467-024-45088-3

IF: 16.6

2024-01-27

Nature Communications

Abstract:Abstract Simultaneously generating various motion modes with high strains in piezoelectric devices is highly desired for high-technology fields to achieve multi-functionalities. However, traditional approach for designing multi-degrees-of-freedom systems is to bond together several multilayer piezoelectric stacks, which generally leads to cumbersome and complicated structures. Here, we proposed a transparent piezo metasurface to achieve various types of strains in a wide frequency range. As an example, we designed a ten-unit piezo metasurface, which can produce high strains ( ε 3 = 0.76%), and generate linear motions along X-, Y- and Z-axis, rotary motions around X-, Y- and Z-axis as well as coupled modes. An adaptive lens based on the proposed piezo metasurface was demonstrated. It can realize a wide range of focal length (35.82 cm ~ ∞) and effective image stabilization with relatively large displacements (5.05 μm along Y-axis) and tilt angles (44.02′ around Y-axis). This research may benefit the miniaturization and integration of multi-degrees-of-freedom systems.

multidisciplinary sciences
Active Coding Piezoelectric Metasurfaces

Zhaoxi Li,Chunlong Fei,Shenghui Yang,Chenxue Hou,Jianxin Zhao,Yi Li,Chenxi Zheng,Heping Wu,Yi Quan,Tianlong Zhao,Dongdong Chen,Di Li,Gang Niu,Wei Ren,Meng Xiao,Yintang Yang

DOI: https://doi.org/10.48550/arXiv.2206.14398

2022-06-29

Applied Physics

Abstract:The manipulation of acoustic waves plays an important role in a wide range of applications. Currently, acoustic wave manipulation typically relies on either acoustic metasurfaces or phased array transducers. The elements of metasurfaces are designed and optimized for a target frequency, which thus limits their bandwidth. Phased array transducers, suffering from high-cost and complex control circuits, are usually limited by the array size and the filling ratio of the control units. In this work, we introduce active coding piezoelectric metasurfaces; demonstrate commonly implemented acoustic wave manipulation functionalities such as beam steering, beam focusing and vortex beam focusing, acoustic tweezers; and eventually realize ultrasound imaging. The information coded on the piezoelectric metasurfaces herein is frequency independent and originates from the polarization directions, pointing either up or down, of the piezoelectric materials. Such a piezoelectric metasurface is driven by a single electrode and acts as a controllable active sound source, which combines the advantages of acoustic metasurfaces and phased array transducers while keeping the devices structurally simple and compact. Our coding piezoelectric metasurfaces can lead to potential technological innovations in underwater acoustic wave modulation, acoustic tweezers, biomedical imaging, industrial non-destructive testing and neural regulation.
Dynamic metasurface lens based on MEMS technology

Tapashree Roy,Shuyan Zhang,Il Woong Jung,Mariano Troccoli,Federico Capasso,Daniel Lopez

DOI: https://doi.org/10.1063/1.5018865

IF: 5.6

2018-02-01

APL Photonics

Abstract:In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

optics,physics, applied
Dielectric Resonance-Based Optical Metasurfaces: From Fundamentals to Applications

Wenwei Liu,Zhancheng Li,Hua Cheng,Shuqi Chen

DOI: https://doi.org/10.1016/j.isci.2020.101868

IF: 5.8

2020-12-01

iScience

Abstract:Optical metasurface as a booming research field has put forward profound progress in optics and photonics. Compared with metallic-based components, which suffer from significant thermal loss and low efficiency, high-index all-dielectric nanostructures can readily combine electric and magnetic Mie resonances together, leading to efficient manipulation of optical properties such as amplitude, phase, polarization, chirality, and anisotropy. These advances have enabled tremendous developments in practical photonic devices that can confine and guide light at the nanoscale. Here we review the recent development of local electromagnetic resonances such as Mie-type scattering, bound states in the continuum, Fano resonances, and anapole resonances in dielectric metasurfaces and summarize the fundamental principles of dielectric resonances. We discuss the recent research frontiers in dielectric metasurfaces including wavefront-shaping, metalenses, multifunctional and computational approaches. We review the strategies and methods to realize the dynamic tuning of dielectric metasurfaces. Finally, we conclude with an outlook on the challenges and prospects of dielectric metasurfaces.

multidisciplinary sciences
Active Multifunctional Microelectromechanical System Metadevices: Applications in Polarization Control, Wavefront Deflection, and Holograms

Longqing Cong,Prakash Pitchappa,Yang Wu,Lin Ke,Chengkuo Lee,Navab Singh,Hyunsoo Yang,Ranjan Singh

DOI: https://doi.org/10.1002/adom.201600716

IF: 9

2016-11-28

Advanced Optical Materials

Abstract:Metasurfaces have provided a novel route to control the local phase of electromagnetic radiation through subwavelength scatterers where the properties of each element remain passive. A passive metasurface design can only achieve a specific functionality as it is extremely challenging to reconfigure each element that contributes toward the control of the radiation. In this work, the authors propose a different scheme based on microelectromechanical system (MEMS) to reconfigure the resonance and radiation phase via control of each dipolar element. The suspension angle of the individual bimorph cantilever in air can be precisely controlled through electrostatic actuation that determines the operative phase diagram of the metadevice. The dynamic polarization conversion is demonstrated through global control. In addition, it is proposed that a multifunctional operation such as dynamic wavefront deflection and rewritable holographic display can be accomplished by using 1D and 2D control of the cantilever array when each cantilever in the MEMS metadevice array is uniformly and accurately controlled in the large‐area samples. Such a rewritable proposition can enable myriad of applications of MEMS‐based metadevices in polarization‐division multiplexing and dynamic flat lenses. The microelectromechanical system (MEMS)‐based metadevice provides the freedom to encode at the unit cell level. A multifunctional MEMS metadevice is proposed for active polarization conversion, dynamic wavefront deflection, and real‐time rewritable holographic displays.

materials science, multidisciplinary,optics
Dynamic Light Shaping Using Active Optical Metasurfaces

Fan Yang,Cosmin-Constantin Popescu,Carlos A. Ríos Ocampo,Yifei Zhang,Mikhail Shalaginov,Hung-I Lin,Sensong An,Hyun Jung Kim,Matthew Julian,Calum Williams,Kiumars Aryana,Scott M. Bartram,Stephen E. Borg,William M. Humphreys,Clara Rivero-Baleine,Paul Miller,Christopher Roberts,Steven Vitale,Hualiang Zhang,Juejun Hu,Tian Gu

DOI: https://doi.org/10.1117/12.2664410

2023-01-01

Abstract:Optical metasurfaces are planar subwavelength nanoantenna arrays engineered to provide on-demand manipulation of light, thereby enabling ultra-compact flat optics with high performance, small form-factor and new functionalities. When integrated with active elements, the pixelated, thin device architecture further facilitates dynamic tuning of local and global optical responses. Leveraging advanced materials, designs and architectures, we develop novel active and passive meta-optics capable of transforming a variety of optical systems that are traditionally bulky and complicated.
Dynamic control of mode modulation and spatial multiplexing using hybrid metasurfaces

Zemeng Lin,Lingling Huang,Ruizhe Zhao,Qunshuo Wei,Thomas Zentgraf,Yongtian Wang,Xiaowei Li

DOI: https://doi.org/10.1364/OE.27.018740

2020-02-11

Abstract:Designing reconfigurable metasurfaces that can dynamically control scattered electromagnetic waves and work in the near-infrared (NIR) and optical regimes remains a challenging task, which is hindered by the static material property and fixed structures. Phase change materials (PCMs) can provide high contrast optical refractive indexes at high frequencies between amorphous and crystal states, therefore are promising as feasible materials for reconfigurable metasurfaces. Here, we propose a hybrid metasurface that can arbitrarily modulate the complex amplitude of incident light with uniform amplitude and full $2\pi$ phase coverage by utilizing composite concentric rings (CCRs) with different ratios of gold and PCMs. Our designed metasurface possesses a bi-functionality that is capable of splitting beams or generating vortex beams by thermal switching between metal and semiconductor states of vanadium oxide (VO2), respectively. It can be easily integrated into low loss photonic circuits with an ultra-small footprint. Our metadevice serves as a novel paradigm for active control of beams, which may open new opportunities for signal processing, memory storage, holography, and anti-counterfeiting.

Optics,Applied Physics
Electrically Tunable Optical Metasurfaces for Dynamic Polarization Conversion

Ping Yu,Jianxiong Li,Na Liu

DOI: https://doi.org/10.1021/acs.nanolett.1c02318

IF: 10.8

2021-07-21

Nano Letters

Abstract:Dynamic control over the polarization of light is highly desirable in many optical applications, including optical communications, laser science, three-dimensional displays, among others. Conventional methods for polarization control are often based on bulky optical elements. To achieve highly integrated optical devices, metasurfaces, which have been intensively studied in recent years, hold great promises to replace conventional optical elements for a variety of optical functions. In this work, we demonstrate electrically tunable optical metasurfaces for dynamic polarization conversion at visible frequencies. By exploring both the geometric and propagation phase tuning capabilities, rapid and reversible polarization rotation up to 90° is achieved for linearly polarized light. The dynamic functionality is imparted by liquid crystals, which serve as a thin surrounding medium with electrically tunable refractive indices for the metasurface antennas. Furthermore, we expand our concept to demonstrate electrically tunable metasurfaces for dynamic holography and holographic information generation with independently controlled multiple pixels.This article has not yet been cited by other publications.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Polarization-multiplexed Wavefront-Engineering by All-Dielectric Metasurface with Asymmetric Polarization-Decoupled Meta-Atoms.

Hao Wang,Baifu Zhang,Cheng Han,Jianping Ding

DOI: https://doi.org/10.1364/oe.440221

IF: 3.8

2021-01-01

Optics Express

Abstract:Polarization multiplexing of metasurfaces conventionally requires the synthesis of both geometric and dynamic phases of meta-atoms. We propose a dynamic-phase-only polarization-multiplexing metasurface that consists of three types of polarization-decoupled meta-atoms and covers the 0–2π phase range. As illustrative examples, we designed and investigated a polarized beam splitter that can independently deflect x- and y-polarized incident lights at arbitrary angles. Furthermore, we designed and studied polarization-multiplexing metasurface-holography embracing double channels of orthogonal polarizations. Both metadevices demonstrate the effectiveness of our approach. This study paves the way for the design of polarization-multiplexing electromagnetic structures for application in metamaterials and metasurfaces.
Electroelastic metasurface with resonant piezoelectric shunts for tunable wavefront control

Zhenkun Lin,Serife Tol

DOI: https://doi.org/10.1088/1361-6463/acbd5f

2023-02-22

Abstract:In this paper, we design a tunable phase-modulated metasurface composed of periodically distributed piezoelectric patches with resonant-type shunt circuits. The electroelastic metasurface can control the wavefront of the lowest antisymmetric mode Lamb wave (A0 mode) in a small footprint due to its subwavelength features. The fully coupled electromechanical model is established to study the transmission characteristics of the metasurface unit and validated through numerical and experimental studies. Based on the analysis of the metasurface unit, we first explore the performance of electroelastic metasurface with single-resonant shunts and then extend its capability with multi-resonant shunts. By only tuning the electric loads in the shunt circuits, we utilize the proposed metasurface to accomplish wave deflection and wave focusing of A0 mode Lamb waves at different angles and focal points, respectively. Numerical simulations show that the metasurface with single-resonant shunts can deflect the wavefront of 5 kHz and 6 kHz flexural waves by desired angles with less than 2% deviation. In addition, it can be tuned to achieve nearly three times displacement amplification at the designed focal point for a wide range of angles from −75◦ to 75◦. Furthermore, with multi-resonant shunts, the piezoelectric-based metasurface can accomplish anomalous wave control over flexural waves at different positions. multiple frequencies (i.e., simultaneously at 5 kHz and 10 kHz), developing new potentials toward a broad range of engineering applications such as demultiplexing various frequency components or guiding and focusing them at different positions.

physics, applied
Piezoelectric Elastic Metasurface for Tunable Guided Waves Control in Plate

Shixuan Shao,Rongyu Xia,Zheng Li

DOI: https://doi.org/10.1117/12.2593858

2021-01-01

Abstract:In this work, an electromechanical metasurface is designed for wave controlling of multi-mode guided waves in plate, including shear horizontal wave, symmetrical mode and anti-symmetrical mode of Lamb waves. The metasurface is constructed by staggered arrangement of in-plane polarized and out-of-plane polarized piezoelectric patches, which are connected with shunting circuits. The transmitted phase of different guided wave modes can be changed individually in 0~2π range by adjusting the negative capacitances of the shunting circuits without changing the structure geometry. By coding transmitted phase along the metasurface, multi-function including tunable focusing and tunable anomalous refraction of guided waves can be achieved by wave front control. Furthermore, by modulating each mode wave simultaneously, the incident mixed guided wave can be separated after transmitting through the metasurface and specific wave mode can be further extracted.
Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

Jonas Berzinš,Simonas Indrišiūnas,Koen van Erve,Arvind Nagarajan,Stefan Fasold,Michael Steinert,Giampiero Gerini,Paulius Gečys,Thomas Pertsch,Stefan M. B. Bäumer,Frank Setzpfandt

DOI: https://doi.org/10.1021/acsnano.0c01993

2020-03-07

Abstract:High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of a great interest in a variety of applications such as imaging, sensing, photovoltaics and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the pre-deposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication paves the way towards a simple realization of spatially invariant metasurface-based devices.

Optics,Materials Science,Applied Physics
Electro-optically Modulated Nonlinear Metasurfaces

Zhengqing He,Lun Qu,Wei Wu,Jikun Liu,Chunyan Jin,Chenxiong Wang,Jingfei You,Weiye Liu,Lu Bai,Zhidong Gu,Wei Cai,Mengxin Ren,Jingjun Xu

DOI: https://doi.org/10.1021/acs.nanolett.4c03369

IF: 10.8

2024-10-30

Nano Letters

Abstract:Electrically reconfigurable nonlinear metasurfaces provide dynamic control over nonlinear phenomena such as second-harmonic generation (SHG), unlocking novel applications in signal processing, light switching, and sensing. Previous methods, like electric-field-induced SHG in plasmonic metasurfaces and Stark-tuned nonlinearities in quantum well metasurfaces, face limitations due to weak SHG responses from metals and mid-infrared constraints of quantum wells, respectively. Addressing the need for...

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Dynamic Perovskite Metasurfaces: Lead Halide Perovskite‐Based Dynamic Metasurfaces (laser Photonics Rev. 13(7)/2019)

Chen Zhang,Shumin Xiao,Yuhan Wang,Yisheng Gao,Yubin Fan,Can Huang,Nan Zhang,Wenhong Yang,Qinghai Song

DOI: https://doi.org/10.1002/lpor.201970030

2019-01-01

LASER & PHOTONICS REVIEWS

Abstract:In article number 1900079, Shumin Xiao, Qinghai Song, and co-workers demonstrate a perovskite metasurface at the working wavelength of 632 nm, displaying high-efficiency polarization conversion, anomalous reflection, and meta-holograms. The bandgap of the perovskite can be post-synthetically and reversibly tuned via anion exchange. For the holograms, reflected light is imaged on a screen, where the experimental results of “ON” and “OFF” are displayed simultaneously. The designed devices should have future applications in the semiconductor field.
Polarization-multiplexed Full-Space Metasurface Simultaneously Merging with an Ultrawide-Angle Antireflection and a Large-Angle Retroreflection

Zuntian Chu,Tiefu Li,Jiafu Wang,Yuxiang Jia,Jinming Jiang,Ruichao Zhu,Lei Li,Shaobo Qu

DOI: https://doi.org/10.1364/oe.474762

IF: 3.8

2022-01-01

Optics Express

Abstract:Multifunctional electromagnetic (EM) metasurfaces are capable of manipulating electromagnetic waves with kaleidoscopic functions flexibly, which will significantly enhance integration and applications of electronic systems. However, most known design schemes only realize the reflection or transmission functions under a specific angle range, which wastes the other half EM space and restricts wider applications of multifunctional metadevices. Herein, an encouraging strategy of broadband and wide-angle EM wavefronts generator is proposed to produce two independent functions, i.e., antireflections for transverse electric (TE) waves and retroreflection for transverse magnetic (TM) waves, which utilizes band-stop and bandpass responses of the metasurface, respectively. As a feasibility verification of this methodology, a three-layer cascaded metasurface, composed of anisotropic crossbar structures patterned on the two surfaces of a dielectric substrate with sandwiched orthogonal metal-gratings, is designed, fabricated, and measured. Both the simulated and experimental results are in good accordance with theoretical analyses. This full-space metasurface opens up a new route to multifunctional metasurfaces and will further promote engineering applications of metasurfaces.
All-Dielectric Silicon/Phase-Change Optical Metasurfaces with Independent and Reconfigurable Control of Resonant Modes

Carlota Ruiz de Galarreta,Ivan Sinev,Arseny M. Alexeev,Pavel Trofimov,Konstantin Ladutenko,Santiago Garcia-Cuevas Carrillo,Emanuele Gemo,Anna Baldycheva,V. Karthik Nagareddy,Jacopo Bertolotti,C. David Wright

DOI: https://doi.org/10.48550/arXiv.1901.04955

2019-01-15

Optics

Abstract:All-dielectric metasurfaces consisting of arrays of nanostructured high-refractive-index materials, typically Si, are re-writing what is achievable in terms of the manipulation of light. Such devices support very strong magnetic, as well as electric, resonances, and are free of ohmic losses that severely limit the performance of their plasmonic counterparts. However, the functionality of dielectric-based metasurfaces is fixed-by-design, i.e. the optical response is fixed by the size, arrangement and index of the nanoresonators. A far wider range of applications could be addressed if active/reconfigurable control were possible. We demonstrate this here, via a new hybrid metasurface concept in which active control is achieved by embedding deeply sub-wavelength inclusions of a tuneable chalcogenide phase-change material within the body of high-index Si nanocylinders. Moreover, by strategic placement of the phase-change layer, and switching of its phase-state, we show selective and active control of metasuface resonances. This yields novel functionality, which we showcase via a dual- to mono-band meta-switch operating simultaneously in the O and C telecommunication bands.

Dynamic piezoelectric MEMS-based optical metasurfaces

Dynamic MEMS-based optical metasurfaces

Plasmon Hybridization Induced by Quasi Bound State in the Continuum of Graphene Metasurfaces Oriented for High-Accuracy Polarization-Insensitive Two-Dimensional Sensors

MEMS-integrated metasurfaces for dynamic linear polarizers

Electrically tunable topological phase transition in non-Hermitian optical MEMS metasurfaces

Designing transparent piezoelectric metasurfaces for adaptive optics

Active Coding Piezoelectric Metasurfaces

Dynamic metasurface lens based on MEMS technology

Dielectric Resonance-Based Optical Metasurfaces: From Fundamentals to Applications

Active Multifunctional Microelectromechanical System Metadevices: Applications in Polarization Control, Wavefront Deflection, and Holograms

Dynamic Light Shaping Using Active Optical Metasurfaces

Dynamic control of mode modulation and spatial multiplexing using hybrid metasurfaces

Electrically Tunable Optical Metasurfaces for Dynamic Polarization Conversion

Polarization-multiplexed Wavefront-Engineering by All-Dielectric Metasurface with Asymmetric Polarization-Decoupled Meta-Atoms.

Electroelastic metasurface with resonant piezoelectric shunts for tunable wavefront control

Piezoelectric Elastic Metasurface for Tunable Guided Waves Control in Plate

Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference

Electro-optically Modulated Nonlinear Metasurfaces

Dynamic Perovskite Metasurfaces: Lead Halide Perovskite‐Based Dynamic Metasurfaces (laser Photonics Rev. 13(7)/2019)

Polarization-multiplexed Full-Space Metasurface Simultaneously Merging with an Ultrawide-Angle Antireflection and a Large-Angle Retroreflection

All-Dielectric Silicon/Phase-Change Optical Metasurfaces with Independent and Reconfigurable Control of Resonant Modes