Abstract:Objective. Recording and stimulating neuronal activity across different brain regions requires interfacing at multiple sites using dedicated tools while tissue reactions at the recording sites often prevent their successful long-term application. This implies the technological challenge of developing complex probe geometries while keeping the overall footprint minimal, and of selecting materials compatible with neural tissue. While the potential of soft materials in reducing tissue response is uncontested, the implantation of these materials is often limited to reliably target neuronal structures across large brain volumes. Approach. We report on the development of a new multi-electrode array exploiting the advantages of soft and stiff materials by combining 7-µm-thin polyimide wings carrying platinum electrodes with a silicon backbone enabling a safe probe implantation. The probe fabrication applies microsystems technologies in combination with a temporal wafer fixation method for rear side processing, i.e. grinding and deep reactive ion etching, of slender probe shanks and electrode wings. The wing-type neural probes are chronically implanted into the entorhinal-hippocampal formation in the mouse for in vivo recordings of freely behaving animals. Main results. Probes comprising the novel wing-type electrodes have been realized and characterized in view of their electrical performance and insertion capability. Chronic electrophysiological in vivo recordings of the entorhinal-hippocampal network in the mouse of up to 104 days demonstrated a stable yield of channels containing identifiable multi-unit and single-unit activity outperforming probes with electrodes residing on a Si backbone. Significance. The innovative fabrication process using a process compatible, temporary wafer bonding allowed to realize new Michigan-style probe arrays. The wing-type probe design enables a precise probe insertion into brain tissue and long-term stable recordings of unit activity due to the application of a stable backbone and 7-µm-thin probe wings provoking locally a minimal tissue response and protruding from the glial scare of the backbone.

Versatile Surface Electrodes for Combined Electrophysiology and Two-Photon Imaging of the Mouse Central Nervous System

Multimodal Integrated Flexible Neural Probe for in Situ Monitoring of EEG and Lactic Acid

Integrated Microprism and Microelectrode Array for Simultaneous Electrophysiology and Two‐Photon Imaging Across all Cortical Layers

A hybrid micro-ECoG for functionally targeted multi-site and multi-scale investigation

Polymer Skulls With Integrated Transparent Electrode Arrays for Cortex-Wide Opto-Electrophysiological Recordings

High-Density, Actively Multiplexed μECoG Array on Reinforced Silicone Substrate

A Multi-Channel, Flex-Rigid ECoG Microelectrode Array for Visual Cortical Interfacing

Integrated device for combined optical neuromodulation and electrical recording for chronic in vivo applications (vol 9, 016001, 2012)

Intracortical Probe Arrays with Silicon Backbone and Microelectrodes on Thin Polyimide Wings Enable Long-Term Stable Recordings in Vivo

Flexible Optoelectric Neural Interface Integrated Wire-Bonding $\mu$ LEDs and Microelectrocorticography for Optogenetics

An Electrocorticography Device with an Integrated Microfluidic Ion Pump for Simultaneous Neural Recording and Electrophoretic Drug Delivery In Vivo

A Multimodal, SU-8 - Platinum - Polyimide Microelectrode Array for Chronic In Vivo Neurophysiology

Fully Integrated 3D Microelectrode Arrays with Polydopamine-Mediated Silicon Dioxide Insulation for Electrophysiological Interrogation of a Novel 3D Human, Neural Microphysiological Construct.

Hippocampal recording with a soft microelectrode array in a cranial window imaging scheme: a validation study

Carbon Nanotube Array‐Based Flexible Multifunctional Electrodes to Record Electrophysiology and Ions on the Cerebral Cortex in Real Time

Ultraflexible PEDOT:PSS/IrOx-Modified Electrodes: Applications in Behavioral Modulation and Neural Signal Recording in Mice

New thin-film surface electrode array enables brain mapping with high spatial acuity in rodents

Chronic neural probe for simultaneous recording of single-unit, multi-unit, and local field potential activity from multiple brain sites

Ultrathin, flexible and MRI-compatible microelectrode array for chronic single units recording within subcortical layers

A Microelectrode Array Incorporating an Optical Waveguide Device for Stimulation and Spatiotemporal Electrical Recording of Neural Activity

Microelectronic system for high-resolution mapping of extracellular electric fields applied to brain slices