Piezoelectric strain sensor through reverse replication based on two-photon polymerization

Rishikesh Srinivasaraghavan Govindarajan,Taylor Stark,Stanislav Sikulskyi,Foram Madiyar,Daewon Kim
DOI: https://doi.org/10.1117/12.2630955
2022-04-18
Abstract:Polymer-based composite incorporated with inorganic filler has shown great potential for developing high-performance piezoelectric sensors as they offer unique properties and design flexibility. The aim of this paper is to investigate the impact of nanoparticles on the piezoelectric property enhancement of the developed composite. The piezoelectric substrate made of PVDF-TrFE/ BaTiO3 is replicated reversely through a master mold made of IP-Q resin with IDT design printed using a two-photon polymerization (2PP) method. IDT channels are filled with a conductive material, and excess material on the surface is etched using oxygen plasma. The crystalline phase characteristics and surface morphology of fabricated substrate are examined using Fourier transform infrared spectroscopy (FT-IR) and scanning electron microscope (SEM). Strain detection of the developed sensor is evaluated by determining the change in scattering parameter using a network analyzer.
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