A technique for high-precision drift correction in electron microscopes

Mitsutoshi Kobayashi,Atsushi Miyamoto,Maki Tanaka,Yoshinobu Hoshino
DOI: https://doi.org/10.1088/1361-6501/ac1edc
IF: 2.398
2021-09-03
Measurement Science and Technology
Abstract:We propose a technique for improving the image quality of electron microscopes, which are widely used for the observation and analysis of microscopic structures. To improve the visual recognition of frame addition images of electron microscopes, it is necessary to perform correlation calculations in order to line up the frame images and eliminate the small positional offsets (drifts) between them. However, since the individual frames have a very low signal-to-noise ratio, it is difficult to estimate these drifts stably. To address this problem, we propose a phase-only correlation method that uses a combination of noise suppression and highly accurate estimation of phase images based on complex wavelet transform. By implementing this method in a parallel processor, we have made it possible to observe fine structures with high definition in real time (30 frame s−1).
engineering, multidisciplinary,instruments & instrumentation
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