Abstract:Manufacturing of semiconductor chips involves hundreds of process steps. For high-throughput semiconductor manufacturers, it is not feasible to get all the quality measurements of wafers at each step because of expensive costs. Based on the limited measurements of sampled wafers, virtual metrology (VM) allows predicting the relevant quality variables without increasing the number of physical measurements. Traditional data-driven VM methods are constructed using a predefined model along with feature extractions in data pre-processing. Often the identified VM model is not reliable if the constructed model and the extracted features are improper. In this paper, the convolutional neural network (CNN) based Gaussian process regression (GPR) VM mode (CNN-GPR) calibrated by maximization of the Bayesian posterior density distribution is systematically developed. CNN is used to extract information from massive wafer data through layers of the cascade-connected convolving filters. With the extracted features, the GPR model associates the stochastic nature of the operating steps with the quality variables to obtain the predicted means as well as the quantitated uncertainty levels. Unlike the traditional VM models where the extracted features and the prediction models are generated separately, the CNN-GPR model is sensitive to the variations of the quality variables and the features are determined simultaneously through the covariance matrices with information from both of the process and the quality variables. The proposed CNN-GPR model performs better as it represents the complex process of the whole set of measured variables. Through the studies on a real semiconductor process, the effectiveness of the proposed algorithm is demonstrated and compared against the regular regression algorithms.

A Probabilistic Machine Learning Approach for the Uncertainty Quantification of Electronic Circuits Based on Gaussian Process Regression

Probabilistic Computation with Emerging Covariance: Towards Efficient Uncertainty Quantification

Gaussian Process Regression Approach for Robust Design and Yield Enhancement of Self-Assembled Nanostructures

Development of Convolutional Neural Network Based Gaussian Process Regression to Construct a Novel Probabilistic Virtual Metrology in Multi-Stage Semiconductor Processes

Application of Gaussian Processes with Variable Shrinkage Method and Just-in-time Modeling in the Semiconductor Industry

Comparative Study of Surrogate Modeling Methods for Signal Integrity and Microwave Circuit Applications

Machine Learning-Based System Optimization and Uncertainty Quantification for Integrated Systems

A hybrid data driven-physics constrained Gaussian process regression framework with deep kernel for uncertainty quantification

Uncertainty Quantification of RF Circuits Using Stochastic Collocation Techniques

Non-intrusive Probabilistic Collocation Method for Operational, Geometrical, and Manufacturing Uncertainties in Engineering Practice

Uncertainty Quantification For Turbulent Flows with Machine Learning

Efficient Uncertainty Modeling for System Design via Mixed Integer Programming

Evaluation of machine learning architectures on the quantification of epistemic and aleatoric uncertainties in complex dynamical systems

Quantifying the Uncertainty in Model Parameters Using Gaussian Process-Based Markov Chain Monte Carlo: An Application to Cardiac Electrophysiological Models

An Uncertainty Quantification and Calibration Framework for RUL Prediction and Accuracy Improvement

Distance Preserving Machine Learning for Uncertainty Aware Accelerator Capacitance Predictions

The Gaussian process modelling module in UQLab

Enhanced Gaussian-mixture-model-based nonlinear probabilistic uncertainty propagation using Gaussian splitting approach

Yield Optimization using Hybrid Gaussian Process Regression and a Genetic Multi-Objective Approach

A novel active learning-based Gaussian process metamodelling strategy for estimating the full probability distribution in forward UQ analysis

Quality measures for the evaluation of machine learning architectures on the quantification of epistemic and aleatoric uncertainties in complex dynamical systems