Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor
T. Bergunde,M. Dauelsberg,Yu. Egorov,L. Kadinski,Yu. N. Makarov,M. Schäfer,G. Strauch,M. Weyers
DOI: https://doi.org/10.1007/978-3-7091-6619-2_80
1995-01-01
Abstract:Advances in development of mathematical models and numerial techniques for modelling of MOCVD in the Planetary Reactor™ are presented. Importance of coupled flow and mass transport calculations, accurate modelling of radiative heat transfer and complex chemical interactions is discussed. Advantages and disadvantages of block-structured and unstructured grid algorithms are considered.
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