Micro Structures and Micro Actuators for Implementing Sub-millimeter Robots

R. S. Fearing

DOI: https://doi.org/10.1007/978-94-011-1818-7_2

1992-01-01

Abstract:There are many advantages to shrinking robots and mechanical actuators to the same size as the parts to be manipulated. Extremely delicate forces can be applied, robots can be readily parallelizable, and the relative accuracy required can be markedly reduced. One of the major difficulties in building millimeter scale micro-robots is overcoming forces due to friction and wiring. Friction forces can be reduced by using flexures instead of rotary or linear sliding joints, and using fluid lubrication, such as an air-bearing. This paper considers two initial ideas towards implementing practical sub-millimeter robotic systems, and then examines a natural analog to a mobile micro-robot: a single celled animal. The first micro-robot will use silicon structures that can be folded out of the plane of the wafer. The second micro-robot system will be built from an air-bearing-supported planar electrostatic motor, made by silicon processing, and has 3 degrees-of-freedom. Mobile devices on a sub-millimeter scale working in a fluid medium could be useful for manipulation and testing of small biological or electro-mechanical components. The power requirements for such robots working at low speeds are very favorable.