Metalenses at Visible Wavelengths: Diffraction-limited Focusing and Subwavelength Resolution Imaging Sciencemag.org Science
Wei Ting Chen,T. Tyler,R. Devlin,A. Ball,J. Oh,Z. Peng,A Arbabi,M. Khorasaninejad,N. Jokerst,S Larouche,M. Bagheri,W.-T Chen,M. Fiorentino,V. Shalaev,J. Li,D. Smith,F. Capasso,Y.-J Tsai,R C Devlin,A. Zhu,John A Paulson,Y. Horie,D. Fattal,N. Emani,Harvard,A. Faraon,A. Boltasseva,A. Kildishev,R. Beausoleil,X Ni
Abstract:Subwavelength resolution imaging requires high numerical aperture (NA) lenses, which are bulky and expensive. Metasurfaces allow the miniaturization of conventional refractive optics into planar structures. We show that high-aspect-ratio titanium dioxide metasurfaces can be fabricated and designed as metalenses with NA = 0.8. Diffraction-limited focusing is demonstrated at wavelengths of 405, 532, and 660 nm with corresponding efficiencies of 86, 73, and 66%. The metalenses can resolve nanoscale features separated by subwavelength distances and provide magnification as high as 170×, with image qualities comparable to a state-of-the-art commercial objective. Our results firmly establish that metalenses can have widespread applications in laser-based microscopy, imaging, and spectroscopy. M etasurfaces are composed of subwave-length-spaced phase shifters at an interface , which allows for unprecedented control over the properties of light (1, 2), and have advanced optical technology by enabling versatile functionalities in a planar structure (1–30). Various optical components, ranging from lenses, holograms and gratings to polarization-selective devices, have been demonstrated using silicon-based (7–19) and plasmonic metasurfaces (3, 4, 21–27). However, the high intrinsic losses of silicon and plasmonic materials in the visible range (400 to 700 nm) have prevented the realization of highly efficient meta-surfaces in this region. Although this challenge can be partially overcome by using dielectric materials with a transparency window in the visible spectrum (e.g., GaP, SiN, and TiO 2), achieving full control over the phase of light requires precise , high-aspect-ratio nanostructures, which are in turn restricted by available nanofabrication methods. Recently, we have developed an approach based on titanium dioxide (TiO 2) (31) prepared by atomic layer deposition (ALD) (32), which enables fabrication of high-aspect-ratio metasurfaces that are lossless in the visible spectrum. Here, we demonstrate highly efficient metalenses at visible wavelengths (l = 405, 532, and 660 nm) with efficiencies as high as 86%. They have high numerical apertures (NA) of 0.8 and are capable of focusing light into diffraction-limited spots. At their respective design wavelengths, these focal spots are smaller by a factor of ~1.5 than those from a commercially available, high-NA objective (100× Nikon CFI 60; NA = 0.8). Imaging using these metalenses shows that they can yield subwavelength resolution, with image qualities comparable to that obtained by the commercial objective. Planar lens design and fabrication Typical high-NA objectives consist of precision-engineered compound lenses which make them bulky and expensive, limiting their applications and hindering their integration into compact and cost-effective systems. Singlet planar …
Physics,Materials Science