Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fashionable craze?

A. Manz,J.C. Fettinger,E. Verpoorte,H. Lüdi,H.M. Widmer,D.J. Harrison

DOI: https://doi.org/10.1016/0165-9936(91)85116-9

IF: 14.908

1991-05-01

TrAC Trends in Analytical Chemistry

Abstract:Miniaturization of already existing techniques in on-line analytical chemistry is an alternative to compound-selective chemical sensors. Theory indicates higher efficiency, faster analysis time and lower reagent consumption. Micromachining, a well known photolithographic technique for structures in the micrometer range, is introduced and documented with structures as examples for flow injection analysis, electrophoresis and a detector cell.

chemistry, analytical