Dynamics Model and Vibration Control of Piezoelectric Feeder in Semiconductor Manufacturing Assembly
Zhili Long,Hao Shen,Jianguo Zhang,Shuang Zhao,Yongcheng Lin,Zuohua Li
DOI: https://doi.org/10.1109/tsm.2017.2768620
IF: 2.7
2018-01-01
IEEE Transactions on Semiconductor Manufacturing
Abstract:A piezoelectric vibration feeder is a necessary device for semiconductor manufacturing assembly. Its function is to automatically transport individual chip parts by precision vibration instead of by manual operation. In this paper, a mechanical structure for the piezoelectric feeder and electrical controller is designed and a prototype is developed. A vibration simulation model is established in ANSYS by the finite element method (FEM), and the frequency and vibration modal is attained. The mass-elastic model is established and the frequency is calculated by the numerical method. To drive and control the vibration feeder, a hardware driver consisting of an ARM microcontroller, a sinusoidal pulse width modulation driver module, an inverter circuit of insulated gate bipolar transistor modules, and an LC filter is designed. To achieve resonant vibration, a self-tuned proportional integral derivative (PID) controller for frequency tracking is investigated using MATLAB Simulink simulation. The dynamics and performance of vibration control are then verified through experimental testing using a laser Doppler vibrometer and an impedance analyzer. The mechanical frequencies of the piezoelectric feeder in the FEM, the numerical model, and the experimental measurement are found to agree well. The PID controller used for frequency tracking ensures the resonant vibration, which improves the efficiency and robustness of the piezoelectric feeder.