Synthesizing Metal Oxide Semiconductors on Doped Si/SiO 2 Flexible Fiber Substrates for Wearable Gas Sensing

Feng Niu,Fugong Zhou,Zhixun Wang,Lei Wei,Jie Hu,Lei Dong,Yifei Ma,Mei Wang,Suotang Jia,Xuyuan Chen,Zhaomin Tong
DOI: https://doi.org/10.34133/research.0100
IF: 11
2023-01-01
Research
Abstract:Traditional metal oxide semiconductor (MOS) gas sensors have limited applications in wearable devices owing to their inflexibility and high-power consumption by substantial heat loss. To overcome these limitations, we prepared doped Si/SiO 2 flexible fibers by a thermal drawing method as substrates to fabricate MOS gas sensors. A methane (CH 4 ) gas sensor was demonstrated by subsequently in situ synthesizing Co-doped ZnO nanorods on the fiber surface. The doped Si core acted as the heating source through Joule heating, which conducted heat to the sensing material with reduced heat loss; the SiO 2 cladding was an insulating substrate. The gas sensor was integrated into a miner cloth as a wearable device, and the concentration change of CH 4 was monitored in real time through different colored light-emitting diodes. Our study demonstrated the feasibility of using doped Si/SiO 2 fibers as the substrates to fabricate wearable MOS gas sensors, where the sensors have substantial advantages over tradition sensors in flexibility, heat utilization, etc.
multidisciplinary sciences
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