Abstract:The patterning of semiconductors with complex 3D hierarchical structures having sub-100 nm resolution is propelling a new generation of optical metasurfaces for applications in optoelectronic interconnects and hyperspectral imaging. These complex structures are now manufacturable with the advent of Metal-assisted chemical imprinting (Mac-Imprint). This technique involves bringing a 3D patterned catalytic stamp into contact with a semiconductor substrate in the presence of an etching solution. Recently, a novel class of catalytic stamps made of Au-coated porous polymeric membranes was developed in order to allow for etching solution storage and mass-transport of the reactants, all of which are essential for fast and accurate Mac-Imprint. Further, the flexibility and stretchability of these porous membranes allows for the use of pressure-based actuation to bring both planar and non-planar substrates in conformal contact with the stamp, replicating the set-up of modern nanoimprinting lithography equipment. Due to the contact-based nature of the Mac-Imprint process, it is vital to understand the mechanical behavior of the stamp. Thus, this work attempts to computationally elucidate the mechanical behavior of the stamp during conformal Mac- Imprint. In particular, the elastic behavior of a stamps laminate made of commercial porous polyvinylidene fluoride (PVDF) with nominal pore sizes of 100 nm and solid polyimide (PI) is modelled using finite element analysis (FEA) in a commercial ANSYS software with material constants, extracted via uniaxial tensile test. The FEA prediction using 2D axisymmetric model is able to capture the induced biaxial stress, strain, deflection and yield of the porous PVDF. To validate simulation results, a deflection test was experimentally performed as a function of air pressure and the obtained results matched with the FEA simulation.

High‐Temperature Melt Stamping of Polymers Using Polymer/Nanoporous Gold Composite Stamps

Dynamics of Liquid Transfer from Nanoporous Stamps in High-Resolution Flexographic Printing

Phenolic Resin Dual-Use Stamps for Capillary Stamping and Decal Transfer Printing

Reactive additive capillary stamping with double network hydrogel-derived aerogel stamps under solvothermal conditions

Microcontact printing of dendrimers, proteins, and nanoparticles by porous stamps.

Scalable Lithography From Natural Dna Patterns Via Polyacrylamide Gel

Solvent-Free High-Temperature Capillary Stamping of Stimuli-Responsive Polymers: Wettability Management by Orthogonal Substrate Functionalization

Capillary stamping of functional materials: parallel additive substrate patterning without ink depletion

Capillary Nanostamping with Spongy Mesoporous Silica Stamps

Understanding mechanical response of porous polymeric stamps during large-area metal-assisted chemical imprinting of silicon

Topographically Flat, Chemically Patterned PDMS Stamps Made by Dip‐Pen Nanolithography

Fabrication and Application of High Quality Poly(Dimethylsiloxane) Stamps by Gamma Ray Irradiation

Preparation of Hydrophilic Poly(dimethylsiloxane) Stamps by Plasma-Induced Grafting

High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps

Substrate Patterning Using Regular Macroporous Block Copolymer Monoliths as Sacrificial Templates and as Capillary Microstamps

Precision-induced localized molten liquid metal stamps for damage-free transfer printing of ultrathin membranes and 3D objects

Porous multilayer-coated PDMS stamps for protein printing.

Scanner‐Based Capillary Stamping

UV-based nanoimprinting lithography with a fluorinated flexible stamp

DNA Nanostructures-Mediated Molecular Imprinting Lithography.