High-resolution limited-angle phase tomography of dense layered objects using deep neural networks

Alexandre Goy,Girish Rughoobur,Shuai Li,Kwabena Arthur,Akintunde I. Akinwande,George Barbastathis
DOI: https://doi.org/10.1073/pnas.1821378116
IF: 11.1
2019-09-16
Proceedings of the National Academy of Sciences
Abstract:Significance We demonstrate that it is possible to use deep neural networks to produce tomographic reconstructions of dense layered objects with small illumination angle as low as 10 °. It is also shown that a DNN trained on synthetic data can generalize well to and produce reconstructions from experimental measurements. This work has application in the field of X-ray tomography for the inspection of integrated circuits and other materials studies.
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