C -Axis Aligned Composite InZnO via Thermal Atomic Layer Deposition for 3D Nanostructured Semiconductor

Hye-Mi Kim,Seong-Hwan Ryu,Sangwook Kim,Kwang-Hee Lee,Jin-Seong Park
DOI: https://doi.org/10.1021/acsami.3c16879
IF: 9.5
2024-03-16
ACS Applied Materials & Interfaces
Abstract:Amorphous oxide semiconductors have been widely studied for various applications, including thin-film transistors (TFTs) for display backplanes and semiconductor memories. However, the inherent instability, limited mobility, and complexity of multicomponent oxide semiconductors for achieving high aspect ratios and conformality of cation distribution remain challenging. Indium-zinc oxide (IZO), known for its high mobility, also faces obstacles in instability resulting from high carrier doping...
materials science, multidisciplinary,nanoscience & nanotechnology
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