High-performance flexible tactile sensor enabled by multi-contact mechanism for normal and shear force measurement
Yuan Zhu,Yahui Li,Dongdong Xie,Bo Yan,Yongjin Wu,Yanxin Zhang,Guilian Wang,Liyan Lai,Yunna Sun,Zhuoqing Yang,Guifu Ding
DOI: https://doi.org/10.1016/j.nanoen.2023.108862
IF: 17.6
2023-12-01
Nano Energy
Abstract:Flexible tactile sensors are essential components of pressure monitoring in the fields of electronic skin, health care, and robotic hands. Currently, there is a great demand for tactile sensors that exhibit high sensitivity, linearity, and a wide dynamic range, as they play an increasingly vital role in information exchange. However, it is still challenging to achieve a synchronous improvement in performance through a simple strategy. Theoretically, we present the multi-contact mechanism for sensing enhancement by changing the contact mode and the initial state. Specifically, the curved polydimethylsiloxane (PDMS)/multi-walled carbon nanotubes (MWCNTs) surface ensures the continuity of contact deformation, leading to a wide dynamic range. Besides, the discrete resistor pillars on the micro-honeycomb electrodes (MHEs) depress the initial current, and thus enhance the sensitivity. Experimentally, we utilize microelectromechanical systems (MEMS) technology to fabricate the MHEs, mainly including patterning and micro-electroforming processes. By adjusting the resistor distribution density and the curvature of PDMS contact, the extraordinary sensitivity is tuned from 25.88 kPa−1 to 64.68 kPa−1, and the maximum detection pressure switches between 500 kPa and 1400 kPa, which is consistent with the physical model. Furthermore, a proof-of-concept of the flexible three-axis tactile sensor demonstrates the possibility of realizing normal and force measurement. These results reveal the great application prospect of tactile sensors based on multi-contact mechanism in future wearable electronics.
materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology