Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection

Maria Assunta Signore,Gabriele Rescio,Luca Francioso,Flavio Casino,Alessandro Leone
DOI: https://doi.org/10.3390/s24072071
IF: 3.9
2024-03-25
Sensors
Abstract:In this study, we propose a low-cost piezoelectric flexible pressure sensor fabricated on Kapton® (KaptonTM Dupont) substrate by using aluminum nitride (AlN) thin film, designed for the monitoring of the respiration rate for a fast detection of respiratory anomalies. The device was characterized in the range of 15–30 breaths per minute (bpm), to simulate moderate difficult breathing, borderline normal breathing, and normal spontaneous breathing. These three breathing typologies were artificially reproduced by setting the expiratory to inspiratory ratios (E:I) at 1:1, 2:1, 3:1. The prototype was able to accurately recognize the breath states with a low response time (~35 ms), excellent linearity (R2 = 0.997) and low hysteresis. The piezoelectric device was also characterized by placing it in an activated carbon filter mask to evaluate the pressure generated by exhaled air through breathing acts. The results indicate suitability also for the monitoring of very weak breath, exhibiting good linearity, accuracy, and reproducibility, in very low breath pressures, ranging from 0.09 to 0.16 kPa. These preliminary results are very promising for the future development of smart wearable devices able to monitor different patients breathing patterns, also related to breathing diseases, providing a suitable real-time diagnosis in a non-invasive and fast way.
engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
What problem does this paper attempt to address?
The aim of this paper is to address the development of a low-cost, flexible piezoelectric pressure sensor for monitoring respiratory rate and quickly detecting respiratory abnormalities. Specifically, the study proposes a flexible piezoelectric pressure sensor based on aluminum nitride (AlN) thin film, which can accurately identify respiratory states under different breathing patterns (such as normal breathing, near-normal breathing, and moderate dyspnea). Additionally, the sensor is capable of monitoring very weak respiratory signals and exhibits good linearity, accuracy, and repeatability within a pressure range as low as 0.09 to 0.16 kPa. The ultimate goal is to develop an intelligent wearable device that can diagnose different patients' breathing patterns in real-time, thereby enabling non-invasive rapid monitoring. This is of great significance for early detection and medical diagnosis.