Abstract:Two-dimensional (2D) transition metal dichalcogenides (TMDs) have attracted attention as polymorphs depending on their phases (1T and 2H) when applying typical synthesis methods. The 2H phase is generally synthesised through chemical vapour deposition (CVD) on a wafer-scale at high temperatures, and many synthesis methods have been reported owing to their thermodynamic stability and semiconductor properties. By contrast, although the 1T phase is meta-stable with an octahedral coordination, thereby limiting the use of synthesis methods, the recent structural advantage in terms of the hydrogen evolution reaction (HER) has been emphasised. Despite this demand, no large-area thin-film synthesis method for 1T-TMDs has been developed. Among several strategies of synthesizing metallic-phase (1T) TMDs, chemical exfoliation (alkali metal intercalation) is a major strategy and others have been used for electron-beam irradiation, laser irradiation, defects, plasma hot electron transfer, and mechanical strain. Therefore, we suggest an innovative synthesis method using plasma-enhanced CVD (PECVD) for both the 1T and 2H phases of TMDs (MoS2 and WS2). Because ions and radicals are accelerated to the substrate within the sheath region, a high-temperature source is not needed for vapour ionisation, and thus the process temperature can be significantly lowered (150 °C). Moreover, a 4-inch wafer-scale of a thin film is an advantage and can be synthesised on arbitrary substrates (SiO2/Si wafer, glassy carbon electrode, Teflon, and polyimide). Furthermore, the PECVD method was applied to TMD-graphene heterostructure films with a graphene-transferred substrate, and for the first time, sequential metal seed layer depositions of W (1 nm) and Mo (1 nm) were sulfurized to MoS2-WS2 vertical heterostructures with Ar + H2S plasma. We considered the prospects and challenges of the new PECVD method in the development of practical applications in next-generation integrated electronics, HER catalysts, and flexible biosensors.

Phase Engineering of Metastable Transition Metal Dichalcogenides via Ionic Liquid Assisted Synthesis

Metastable 1T′-phase group VIB transition metal dichalcogenide crystals

Salt‐assisted 2H‐to‐1T′ Phase Transformation of Transition Metal Dichalcogenides

Phase Engineering of Two‐Dimensional Transition Metal Dichalcogenides

Phase Engineering of Nanomaterials: Transition Metal Dichalcogenides

Metallic Transition Metal Dichalcogenides of Group VIB: Preparation, Stabilization, and Energy Applications

Metastable Phase Control of Two-Dimensional Transition Metal Dichalcogenides on Metal Substrates

Phase-Controlled 1T Transition-Metal Dichalcogenide-Based Multidimensional Hybrid Nanostructures

General Bottom-Up Colloidal Synthesis of Nano-Monolayer Transition-Metal Dichalcogenides with High 1T′-Phase Purity

Composition and phase engineering of metal chalcogenides and phosphorous chalcogenides

Unraveling High-Yield Phase-Transition Dynamics in Transition Metal Dichalcogenides on Metallic Substrates.

Liquid-vapor Growth of Atomically Thin Metal Tellurides with Controllable Polymorphism

Unveiling the ligand-mediated phase engineering mechanism in two-dimensional transition metal chalcogenides through coordination geometry control

Conversion of Non-Van Der Waals Solids to 2D Transition-Metal Chalcogenides.

Engineering Single‐Layer Hollow Structure of Transition Metal Dichalcogenides with High 1T‐Phase Purity for Hydrogen Evolution Reaction

Recent advances on liquid intercalation and exfoliation of transition metal dichalcogenides: From fundamentals to applications

The first progress of plasma-based transition metal dichalcogenide synthesis: a stable 1T phase and promising applications

Recent Strategies for the Synthesis of Phase-Pure Ultrathin 1T/1T' Transition Metal Dichalcogenide Nanosheets

Ionic liquid gating induced self-intercalation of transition metal chalcogenides

Revisiting Intercalation‐Induced Phase Transitions in 2D Group VI Transition Metal Dichalcogenides

Phase Transitions and Water Splitting Applications of 2D Transition Metal Dichalcogenides and Metal Phosphorous Trichalcogenides