Abstract:Exploiting semiconductor fabrication techniques, natural carriers of quantum information such as atoms, electrons, and photons can be embedded in scalable integrated devices. Integrated optics provides a versatile platform for large-scale quantum information processing and transceiving with photons. Scaling up the integrated devices for quantum applications requires highperformance single-photon generation and photonic qubit-qubit entangling operations. However, previous demonstrations report major challenges in producing multiple bright, pure and identical single-photons, and entangling multiple photonic qubits with high fidelity. Another notable challenge is to noiselessly interface multiphoton sources and multiqubit operators in a single device. Here we demonstrate on-chip genuine multipartite entanglement and quantum teleportation in silicon, by coherently controlling an integrated network of microresonator nonlinear single-photon sources and linear-optic multiqubit entangling circuits. The microresonators are engineered to locally enhance the nonlinearity, producing multiple frequencyuncorrelated and indistinguishable single-photons, without requiring any spectral filtering. The multiqubit states are processed in a programmable linear circuit facilitating Bell-projection and fusion operation in a measurement-based manner. We benchmark key functionalities, such as intra-/inter-chip teleportation of quantum states, and generation of four-photon Greenberger-HorneZeilinger entangled states. The production, control, and transceiving of states are all achieved in micrometer-scale silicon chips, fabricated by complementary metal-oxide-semiconductor processes. Our work lays the groundwork for scalable on-chip multiphoton technologies for quantum computing and communication.

Telecom-Band Entanglement Generation for Chipscale Quantum Processing

Transmission of Photonic Quantum Polarization Entanglement in a Nanoscale Hybrid Plasmonic Waveguide

Narrow-band photonic quantum entanglement with counterpropagating domain engineering

On-Chip Generation and Manipulation of Entangled Photons Based on Reconfigurable Lithium-Niobate Waveguide Circuits

Narrowband telecom band polarization-entangled photon source by superposed monolithic cavities

Narrow-band source of polarization-entangled photons with counterpropagating domain engineering

Entanglement formation and violation of Bell's inequality with a semiconductor single photon source

High-quality photonic entanglement out of a stand-alone silicon chip

Generation and dynamic manipulation of frequency degenerate polarization entangled Bell states by a silicon quantum photonic circuit

Narrowband Photonic Quantum Entanglement with Counterpropagating Domain Engineering

Generation and dynamical manipulation of polarization entangled Bell states by a silicon quantum photonic circuit

Time-bin entanglement at telecom wavelengths from a hybrid photonic integrated circuit

Coherent dynamics of a telecom-wavelength entangled photon source

High Visibility Time-Energy Entangled Photons from a Silicon Nanophotonic Chip

High-performance quantum entanglement generation via cascaded second-order nonlinear processes

Broadband Entangled-Photon Pair Generation with Integrated Photonics: Guidelines and A Materials Comparison

Two Polarization Entangled Sources from the Same Semiconductor Chip

Polarization entangled state measurement on a chip

Near-infrared Hong-Ou-Mandel Interference on a Silicon Quantum Photonic Circuit

Chip-To-Chip Quantum Photonic Interconnect By Path-Polarization Interconversion

Chip-to-chip quantum teleportation and multi-photon entanglement in silicon