Abstract:The binary Ta-N chemical system includes several compounds with notable prospects in microelectronics, solar energy harvesting, and catalysis. Among these, metallic TaN and semiconducting Ta3N5 have garnered significant interest, in part due to their synthetic accessibility. However, tantalum sesquinitride (Ta2N3) possesses an intermediate composition and largely unknown physical properties owing to its metastable nature. Herein, Ta2N3 is directly deposited by reactive magnetron sputtering and its optoelectronic properties are characterized. Combining these results with density functional theory provides insights into the critical role of oxygen in both synthesis and electronic structure. While the inclusion of oxygen in the process gas is critical to Ta2N3 formation, the resulting oxygen incorporation in structural vacancies drastically modifies the free electron concentration in the as-grown material, thus leading to a semiconducting character with a 1.9 eV bandgap. Reducing the oxygen impurity concentration via post-synthetic ammonia annealing increases the conductivity by seven orders of magnitude and yields the metallic characteristics of a degenerate semiconductor, consistent with theoretical predictions. Thus, this inverse oxygen doping approach - by which the carrier concentration is reduced by the oxygen impurity - offers a unique opportunity to tailor the optoelectronic properties of Ta2N3 for applications ranging from photochemical energy conversion to advanced photonics.

Anionic and Magnetic Ordering in Rare Earth Tantalum Oxynitrides with an n = 1 Ruddlesden-Popper Structure

P1–xTa8+xN13 (x = 0.1–0.15): A Phosphorus Tantalum Nitride Featuring Mixed‐Valent Tantalum and P/Ta Disorder Visualized by Scanning Transmission Electron Microscopy

The electronic structure of tantalum (oxy)nitrides TaON and Ta3N5

Element Substitution Effect in Transition Metal Oxypnictide Re(O1-Xfx)Tas (re=rare Earth, T=Transition Metal)

Structural and magnetic properties of Ruddlesden–Popper compounds in a double-perovskite family Srn(Fe,Ta)nO3n(SrO)

High-pressure synthesis of Ruddlesden–Popper nitrides

Synthesis and Properties of the Gallium-Containing Ruddlesden-Popper Oxides with High-Entropy B-Site Arrangement

Structural Analysis and Crystal-Field Calculations of Nd 3+ in Gd X Lu 1− X TaO 4 ( X = 0.85) Polycrystalline

Metastable Ta2N3 with Highly Tunable Electrical Conductivity Via Oxygen Incorporation

Tantalum dioxide complexes with dinitrogen. formation and characterization of the side-on and end-on bonded TaO2(NN)x (x = 1-3) complexes.

Structure and Dielectric Properties of Niobium-Rich Potassium Lithium Tantalate Niobate Single Crystals

Thermodynamic And Mechanical Stabilities Of Tantalum Nitride

Atomic order of rare earth ions in a complex oxide: a path to magnetotaxial anisotropy

Structurally triggered orbital and charge orderings in TlMnO$_3$ and related compounds

Electronic and transport properties in Ruddlesden-Popper neodymium nickelates Nd n + 1 Ni n O 3 n + 1 ( n = 1 – 5 )

MnCaTa2O7-A Magnetically Ordered Polar Phase Prepared via Cation Exchange

Synthesis and properties of complex oxides, phases (Ln = rare earth or Y)

Structural and Magnetic Properties of La0.7Sr0.3Mn1−xNixO3 (x ≤ 0.4)

Li2Ba4Al2Ta2N8O, the first barium nitridoalumotantalate with BCT‐zeolite type structure

Structural and Magnetic Properties of (ndxr1−x)3fe24cr5 (r=gd and Tb) Intermetallic Compounds

Structural analysis of complex oxides Ln2MnTa 1+xO7+δ (Ln = rare earth and yttrium) with pyrochlore-related structures