High Precision, Wide Linear Range Capacitive Pressure Sensor Based on PMMA Microspheres for Motion and Breath Monitoring

Jiyong Feng,Bingfang Huang,Zhengwei Fu,Wenfeng Duan,Junhua Huang,Yunfan Wang,Weibo Hang,Xuebin Liu,Zhiping Zeng,Xuchun Gui

DOI: https://doi.org/10.1109/jsen.2024.3503577

IF: 4.3

2024-01-01

IEEE Sensors Journal

Abstract:With the growing interest in human health and wearable smart electronics, flexible pressure sensors, especially those with real-time, remote and wireless monitoring capabilities, have gained significant attention for their potential application in motion monitoring and intelligent healthcare systems. However, achieving a wide detection range while maintaining high sensitivity and linearity remains a challenge. Here, a flexible capacitive pressure sensor was designed and fabricated utilizing polymethyl methacrylate (PMMA) microspheres as the dielectric layer, which is sandwiched between carbon nanotubes (CNTs) interdigital electrode and a MXene-based microstructured electrode. Integrating a sensitive layer with hierarchical microstructure and a periodic microsphere spacer, allows the electrodes to establish multi-level direct contact, thereby significantly enhancing the linearity and detection precision of the sensors. The pressure sensor exhibits a wide detection range of 14.7 Pa–109.2 kPa, a high detection precision of 0.92‰ in full scale, and an exceptional linearity (R² > 0.997) in medium pressure range. Moreover, the sensor exhibits a robust durability over 10,000 cycles, and a fast response time of 132 ms during pressure loading. The constructed sensor holds great promise for deployment in real-time wireless monitoring of pressure responses, making it suitable for applications such as motion tracking, breath monitoring, and integration into wearable healthcare devices.