In Situ Growth of Nanorod-Assembled SnWO4 Via AACVD for Ppb Level Xylene Gas Sensor

Mincong Zhou,Xu Li,Qingji Wang
DOI: https://doi.org/10.1007/s11664-024-11609-5
IF: 2.1
2024-01-01
Journal of Electronic Materials
Abstract:Unique nanostructures contribute to optimizing gas-sensitive properties, which has been widely acknowledged in the field of gas sensing. However, the construction of nanostructures by the in situ method is still challenging. In this work, nanorod-assembled SnWO4 was fabricated directly on interdigital electrodes by a one-step aerosol-assisted chemical vapor deposition method. The xylene gas sensor was developed, featuring low detection limits and fast response. Under the operating temperature of 350°C, the detection limit of the SnWO4 sensor for xylene reaches a minimal level of 10 ppb. Meanwhile, the sensor exhibits excellent performance in response time, providing a rapid response of 2 s to 100 ppm xylene. Apart from this, the sensor also exhibits good selectivity. Among various volatile organic compound gases of the same 100 ppm at 350°C, the sensor’s response to xylene (484
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