Multi-sensors Image Fusion Method for Non-Destructive Inspection in Vertical-Cavity Surface-Emitting Lasers

Minfu Zhang,Jumin Zhao,Shuai Guo,Dengao Li,Bao Tang,Biao Luo
DOI: https://doi.org/10.1007/s13042-024-02464-1
2024-01-01
International Journal of Machine Learning and Cybernetics
Abstract:The detection and analysis of defects in vertical cavity surface emitting lasers (VCSELs) have always been critical issues. However, most traditional methods for VCSELs quality inspection are destructive and require the use of both visible and infrared CCDs, which is inefficient and lacks intelligence. In this paper, we propose an innovative deep learning-based image fusion framework that utilizes electroluminescence technology to acquire infrared defect images. These images are then fused with visible defect images, enabling engineers to simultaneously detect surface defects and dark defects at the aperture of VCSELs. We introduce a GradCrossFusion module that effectively enhances the extraction of texture information from surface defects. To highlight the salient features of infrared images, we also design a loss function combination that enhances the perception of weak features in infrared images. Experimental results show that our method outperforms state-of-the-art fusion methods in terms of information entropy, standard deviation, mutual information, and fusion quality, indicating that our framework has great potential for application in the field of VCSELs defect analysis and detection.
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