Ultra-high-frequency Supercapacitors Surpassing Dynamic Limit of Electrical Double Layer Effects

Xiaohong Wang,Zhangshanhao Li,Minghao Xu,Yier Xia,Ziyun Yan,Jianyou Dai,Bingmeng Hu,Haizhao Feng,Sixing Xu

DOI: https://doi.org/10.21203/rs.3.rs-5032527/v1

2024-01-01

Abstract:The prosperity of microelectronics has intensified the requirement for miniaturized power systems using capacitors with high capacity and broad frequency ranges. Electrochemical supercapacitors (SCs) stand out with their superior capacitance density, surpassing traditional electrolytic capacitors (ECs) by at least two orders of magnitude. However, the intrinsic slow ion dynamics of electrical double layer effects greatly limit SCs’ characteristic frequency, constraining their applicability in microsystems. This work initially constructs a near-ideal micro electrochemical SC, featuring the monolayer graphene as a working electrode, to reveal the ceiling of electrochemical capacitance characteristic frequency. To address this limitation, we introduce a novel Hybrid Electrochemical Electrolytic Capacitor (HEEC) design, which asymmetrically coupling the electrochemical and dielectric effects. At low frequencies, the HEEC's electrochemical segment provides sufficient capacity, while its electrolytic segment takes over at high frequencies, broadening the frequency range. Consequently, the HEEC boasts considerable capacitance density across a broad frequency range. Employing our developed wafer-scale microfabrication techniques, we showcase a micro HEEC device, achieving a groundbreaking characteristic frequency of 44 kHz and a volume capacitance density of 800 μF/cm³. To demonstrate its practicality in microsystems, the HEEC device is integrated with a power management chip and buck circuit module, respectively, with only 2 % space usage compared to commercial AECs, achieving the same performance.