Multilayer Self-filled Iontronic Pressure Sensor with Ultrahigh Sensitivity and Broad Sensing Range

Marouen Zammali,Sijun Liu,Wei Yu

DOI: https://doi.org/10.1016/j.sna.2023.114600

2023-08-13

Abstract:Flexible capacitive pressure sensor has attracted intensive attention as electronic skin, where sensitivity and sensing range are the crucial characteristic parameters. Although the design of electron double layer and surface microstructure can effectively enhance the mechanical-to-capacitance response, the saturated pressure and limited compressibility impede the elaboration of pressure sensors with high sensing range and super-high sensitivity simultaneously. Herein, we develop the multilayer self-filled microstructure that not only greatly improves sensitivity but also broadens the sensing range. Specifically, the self-filled microstructure composed of the protrusions and grooves boosts the contact between electrode and ionic conductor, and the multilayer architecture enhances the structural compressibility. As a result, the multilayer self-filled iontronic pressure sensor (MSIPS) achieves ultrahigh sensitivity (249.7-5182.8 kPa -1 ), unprecedented pressure sensing range (0.05 Pa-750 kPa), a high pressure resolution (26 Pa or 0.0064%), an extreme response rate (7 ms), together with a great durability (2000 cycles at 200 kPa) even under harsh conditions (-30 o C, 100 o C, and humidity 60%). Owing to the aforementioned merits, the MSIPS is capable of recognizing various human movement and biosignals, and most importantly distinguishing tiny pressures under large loads. These results indicate that the MSIPS possesses great potential in advanced biological monitoring and industrial robots.

engineering, electrical & electronic,instruments & instrumentation