Disturbance-immune, Fast Response LITES Gas Sensor Based on Out-Plane Vibration Mode Employing Micro Fabry-Perot Cavity with Heterodyne Phase Demodulation

Ziting Lang,Shunda Qiao,Ying He,Yufei Ma
DOI: https://doi.org/10.1016/j.snb.2024.136412
2024-01-01
Abstract:The disturbance-immune, fast response light-induced thermoelastic spectroscopy (LITES) gas sensor based on out-plane vibration (OPV) mode employing micro Fabry-Perot cavity with heterodyne phase demodulation was firstly reported in this paper. Compared to the traditional in-plane vibration (IPV) mode, the OPV mode has a lower resonance frequency (f0) f 0 ) to enhance the energy accumulation time of the system. The OPV mode based HLITES (OPV-H-LITES) sensor and the IPV mode based H-LITES (IPV-H-LITES) sensor were established using a standard quartz tuning fork (QTF) at the same conditions for performance comparison. Acetylene (C2H2) 2 H 2 ) was selected as the target gas to verify the sensor performance. In comparison to the IPV-H-LITES sensor, there has been a 3.5-fold improvement in signal-to-noise ratio (SNR) of OPV-H-LITES sensor. In order to further improve the sensor performance, a novel self-designed low-frequency QTF was adopted to replace the standard QTF, leading to a 2.3-fold increase in the SNR of the OPV-H-LITES sensor. Finally, a minimum detection limit (MDL) of 7.22 ppm for C2H2 2 H 2 detection was obtained. The proposed technique holds the merits of high sensitivity, power disturbance resistance, wavelength independence, excellent linear concentration response and long-term stability.
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