Ultrafast High-Temperature Sintering of Polymer-Derived Ceramic Thick Film Sensors

Yanzhang Fu,Lida Xu,Fuxin Zhao,Chenhe Shao,Yuelong Li,Lanlan Li,Songyue Chen,Qinnan Chen,Lingyun Wang,Daoheng Sun,Chao Wu
DOI: https://doi.org/10.1016/j.ceramint.2024.07.078
IF: 5.532
2024-01-01
Ceramics International
Abstract:Polymer-derived ceramics (PDCs) find extensive applications as sensitive materials in in-situ thin/thick film sensors (TFSs) co-fabricated with components. However, the prolonged high-temperature sintering steps of PDCs inevitably lead to severe thermal damage to their co-sintered substrates. In this study, we employed an ultrafast high-temperature sintering (UHS) method, achieving rapid sintering of preceramic polymer slurry sensitive films in just a few minutes. Through direct ink writing technology, we patterned the preceramic polymer slurry, followed by UHS to prepare high-temperature ITO/SiCN TFSs. UHS-ITO/SiCN exhibited high sensitivity of microstructure, composition, and electrical characteristics to UHS parameters. The obtained ITO/SiCN resistance grid showed high electrical conductivity (706.89 S m- 1 at room temperature), highly dense surface structure and excellent oxidation resistance. In an air atmosphere, the resistance drift rate of the resistance grid at 900 degrees C was only 0.54 %center dot h-- 1 without any protective layers. Finally, we fabricated an ITO/SiCN heat flux sensor with high sensitivity (78.75 mV/(kW center dot m-- 2 )), a wide range (94.8 kW m-- 2 ), and excellent repeatability. This work has the potential to expand the application of UHS in the manufacturing of novel in-situ TFSs integrated with components.
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