Electric Field-Based Regulation of Satellite Droplets Generated by Continuous Jet Breakup

Xuebin Jiang,Honghui Yang,Yanshen Fang,Liang Hu,Rui Su
DOI: https://doi.org/10.1109/fpm57590.2023.10565612
2023-01-01
Abstract:Continuous jet breakup based on Rayleigh instability is a common method of droplet generation in applications such as extreme ultraviolet source and wafer cleaning. Traditionally, the appearance of satellite droplets has been be avoided due to the pursuit of higher accuracy and efficiency. However, this study proposes a new idea of considering satellite droplets as targeted extreme micro-droplets. The sizes of the satellite droplets were regulated and their corresponding jetting orientations were deflected during the breakup between the main and satellite droplets by adding local electric fields indifferent directions. A multi-physical model was developed to simulate the coupled laminar two-phase flow and electrostatic field, and the equation for charge transportation during jet breakup was deduced. The influence mechanism of factors including electric field distribution, charge distribution, and volume force on the formation of satellite droplets was analyzed through simulation. Besides, the deflection angle and distance of the satellite droplets were calculated using the equivalent capacitance model. Finally, experimental devices were set up to verify the effectiveness of local electric field intervention on jet breakup and satellite droplet separation. The results showed that the experimental scheme can satisfy the stable generation of 50µm satellite droplets jetting through a micro-orifice with a diameter of 200µm.
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