Abstract:In this work, scaling effect on sensor sensitivity has been studied for protein molecule detection using silicon nanowire (SiNW) biosensor. The approach is carried out through quantitative treatment of the system that involves Fermi-Dirac, Poisson-Boltzman, site-binding and Gouy-Chapman-Stern theories. Scaling in buffer concentration and pH level, SiNW width and height are reported. Our study shows, unlike detection of biochemical species of uniform distribution, such as pH sensing, where feature size scaling has monotonic effect to sensitivity, in the case of single molecule detection, while SiNW thickness down scaling has similar monotonic effect, sensitivity would peak out when NW width is shrunk down to certain scale, and degrades if scaling continues.

SCALING EFFECT IN BIOMOLECULE DETECTION USING SILICON NANOWIRE BIOSENSORS