Diamond /sno2 Heterojunction P-N Diodes with Ion/off of 108 and Breakdown Voltage over 400V

Shumiao Zhang,Wei Wang,Feng Wen,Fang Lin,Ruozheng Wang,Qi Li,Genqiang Chen,Zhaoyang Zhang,Hong-Xing Wang
DOI: https://doi.org/10.1109/led.2024.3416626
IF: 4.8157
2024-01-01
IEEE Electron Device Letters
Abstract:The deep level of n-type donors for diamond limits the development of diamond-based electronics, including bipolar transistors, junction field effect transistors, etc. In this study, vertical diamond/SnO2 p-n heterojunction diodes were fabricated. The SnO2 was deposited by electron beam evaporation and its conductivity was tuned by post-annealing process. The electrical characteristics of diamond/SnO2 p-n diodes annealed at400 degrees C and 500 degrees C were investigated. The p-n diodes have a good rectifying ratio of 108, and the maximum break-down voltage is over 400V. XPS results confirm the presence of C-Sn bond at the SnO2/diamond interface after post-annealing, which is speculated to be the key mechanism for the formation of heterojunction. The propose d diamond/SnO2 heterostructure can promote the application of diamond-based power devices for electronic and heterogeneous integration circuits.
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