Fabrication of a thin PDMS film with complex liquid metal electrodes embedded and its application as skin sensors

Zi Ye,Qian Li,Renchang Zhang,Pan Zhang,Lin Gui

DOI: https://doi.org/10.1039/d1ra09394k

IF: 4.036

2022-01-01

RSC Advances

Abstract:Ultra-thin PDMS films with complex liquid metal patterns embedded. The thickness is as thin as 119 μm.

chemistry, multidisciplinary

What problem does this paper attempt to address?

Implantable Wet‐Adhesive Flexible Electronics with Ultrathin Gelatin Film

Ximin Yuan,Weicheng Kong,Pengcheng Xia,Zhenjia Wang,Qing Gao,Jie Xu,Debin Shan,Qingqiang Yao,Zhiyong Ma,Bin Guo,Yong He

DOI: https://doi.org/10.1002/adfm.202404824

IF: 19

2024-01-01

Advanced Functional Materials

Abstract:Implantable flexible electronic has attracted significant research interest in various fields. However, it still faces the challenge of simultaneously achieving tight adhesion to tissues in a mildly wet environment and possessing excellent biocompatibility to reduce immune rejection reactions after implantation. Here, a degradable wet-adhesive flexible electronic device based on liquid metal and ultrathin gelatin film is developed. The ultrathin gelatin film forms numerous hydrogen bonds with tissue in a slightly humid environment, rapidly constructing a wet-adhesive interface without damaging tissue structure. Inkjet printing is utilized to pattern the mixture of liquid metal and PVP on the surface of the ultrathin gelatin to create flexible patch. With the excellent conductivity of liquid metal, low toxicity, and similarity to natural tissue components of gelatin, flexible patch exhibits outstanding biocompatibility and fatigue resistance. It can be implanted in the body for up to 6 weeks, retaining monitoring capabilities and resisting 1 000 000 cycles of bending fatigue. This study provides a novel strategy for the future development of implantable flexible electronics. Through the self-leveling and self-evaporative properties of gelatin solution, nano-scale flexible transparent films are obtained. Leveraging its adhesive properties with a mixture of liquid metal, wet-adhesive flexible electronic devices are fabricated, enabling rapid adhesion in moist environments in vivo and improving the accuracy and stability of implanted monitoring. image
Fabrication of High-Resolution Flexible Circuits and Sensors Based on Liquid Metal Inks by Spraying and Wiping Processing.

Yi Ren,Xuelin Wang,Jing Liu

DOI: https://doi.org/10.1109/tbcas.2019.2935026

2019-01-01

IEEE Transactions on Biomedical Circuits and Systems

Abstract:Owing to the development of soft electronics enabled from liquid metal, flexible and wearable sensors have been attracting more and more interest recently. So far, several types of liquid metal sensors based on soft substrate have been gradually developed. However, there is still too much space to explore regarding fabrication efficiency including resolution etc. which in fact determines further development and applications of liquid-metal flexible sensors. In this article, we proposed and demonstrated a novel method to fabricate liquid-metal circuits on PDMS (Polydimethylsiloxane) by spraying and wiping processing, which simultaneously offers simpler manufacturing process and smaller feature size as compared with existing approaches. According to various desired needs, the PDMS substrate can be prepared with specifically designed micro-channels in advance and then liquid metal entity can be patterned via subsequent spraying and wiping. As experiments indicate, the whole process is quite implementable and convenient. Except for PDMS, we further showed that PDMS mixed up with Ecoflex can also serve as a benign substrate. In order to illustrate the applications of this technique, we successfully produced several typical functional circuits and tested their working performances. Their roles to develop further electrical or thermal resistive sensors were discussed. Overall, the feature size with high reliability has reached 50 μm. The present method is expected to contribute to the development of liquid-metal sensors with high resolution and sensitivity.
A multifunctional electronic skin based on patterned metal films for tactile sensing with a broad linear response range

Min Cai,Zhongdong Jiao,Shuang Nie,Chengjun Wang,Jun Zou,Jizhou Song

DOI: https://doi.org/10.1126/sciadv.abl8313

IF: 13.6

2021-01-01

Science Advances

Abstract:Electronic skins (e-skins) with multifunctional sensing functions have attracted a lot of attention due to their promising applications in intelligent robotics, human-machine interfaces, and wearable healthcare systems. Here, we report a multifunctional e-skin based on patterned metal films for tactile sensing of pressure and temperature with a broad linear response range by implementing the single sensing mechanism of piezoresistivity, which allows for the easy signal processing and simple device configuration. The sensing pixel features serpentine metal traces and spatially distributed microprotrusions. Experimental and numerical studies reveal the fundamental aspects of the multifunctional tactile sensing mechanism of the e-skin, which exhibits excellent flexibility and wearable conformability. The fabrication approach being compatible with the well-established microfabrication processes has enabled the scalable manufacturing of a large-scale e-skin for spatial tactile sensing in various application scenarios.
Ultrathin Epidermal P(VDF-TrFE) Piezoelectric Film for Wearable Electronics

Guo Tian,Liang Tang,Jieling Zhang,Shenglong Wang,Yue Sun,Yong Ao,Tao Yang,Da Xiong,Hongrui Zhang,Boling Lan,Lin Deng,Weili Deng,Weiqing Yang

DOI: https://doi.org/10.1021/acsaelm.2c01760

IF: 4.494

2023-03-08

ACS Applied Electronic Materials

Abstract:Ultrathin epidermal piezoelectric sensors are essential in the next generation of wearable flexible electronics due to their conformal contact with the skin. However, the fabrication and peeling of ultrathin film still face great challenges, and there is an urgent need to develop a facile and effective process. Here, we propose a method of combing spin-coating and aqueous phase exfoliating to prepare the ultrathin poly(vinylidene fluoride-ran-trifluoroethylene) (P(VDF-TrFE)) piezoelectric film with a thickness of about 3 μm. And the thermal treatment is employed to improve its crystallinity and piezoelectricity, resulting in the piezoelectric coefficient of 11.67 pC N–1 and fine sensitivity of 4.56 mV kPa–1. The ultrathin device is successfully applied to monitor the signals of arterial pulse and interactive force, which is expected to provide references for medical diagnosis and robot design. Notably, this work might motivate design principles and methods of ultrathin epidermal devices and promote its applications in wearable flexible electronics.

materials science, multidisciplinary,engineering, electrical & electronic
Flexible Microcircuit of a Liquid Metal Deposit Layer

Jiaye Zhan,Qijia Wang,Yiming Zhao,Fei Zhan,Shousheng Tang,Qian Wang,Jing Liu,Lei Wang

DOI: https://doi.org/10.1002/cnma.202300227

IF: 3.82

2023-01-01

ChemNanoMat

Abstract:Liquid metal (LM) is of great use in many fields (e. g., sensors, biology, electronic circuits). With special mobility, high surface tension and excellent electrical conductivity, it can play a role in the field of flexible electronics. Due to its surface tension, it easily shrinks into a spheroid shape. Especially under the same current condition, the shrinkage of the volume will lead to open circuit, so it is very difficult to produce stable liquid metal ultrathin, ultrafine wire, which has become a barrier limiting the use of liquid metal. In this work, LM is mixed with polydimethylsiloxane to form a micrometer-thick conductive layer by free deposition. The LM is located inside the polymer holes. Not only that, microcircuits are also mapped on the surface of LM deposits. It not only has excellent electrical conductivity, but also has good flexibility. This work explores a simple method to produce a ultrathin conductive film and reduce the size of electronic components, which has potential applications in integrated circuits.
Flexible microcircuit of liquid metal deposit layer

Jiaye Zhan,Qijia Wang,Yiming Zhao,Fei Zhan,Shousheng Tang,Qian Wang,jing liu,Lei Wang

DOI: https://doi.org/10.1002/cnma.202300227

IF: 3.82

2023-07-23

ChemNanoMat

Abstract:Liquid metal (LM) is of great use in many fields. For example, sensors, biology, electronic circuits and so on. With special mobility, high surface tension and excellent electrical conductivity, they can play a role in the field of flexible electronics. Due to its surface tension, it easily shrinks into a spheroid shape. Especially under the same current condition, the shrinkage of the volume will lead to open circuit, so it is very difficult to produce stable liquid metal ultra‐thin, ultra‐fine wire, which has become a barrier limiting the use of liquid metal. In this work, LM is mixed with Polydimethylsiloxane to form micro‐thick conductive layer by free deposition. The LM is located inside the polymer holes. Not only that, microcircuits are also mapped on the surface of LM deposits. It not only has excellent electrical conductivity, but also has good flexibility. This work explores a simple method to produce ultra‐thin conductive film and reduce the size of electronic components, which has potential applications in integrated circuit.

materials science, multidisciplinary,nanoscience & nanotechnology,chemistry
Piezoresistive Electronic-Skin Sensors Produced With Self-Channeling Laser Microstructured Silicon Molds

Yue Su,Wei Zhang,Shanming Chen,Danwen Yao,Xu Zhang,Hongda Chen,Huailiang Xu

DOI: https://doi.org/10.1109/ted.2020.3045962

IF: 3.1

2021-02-01

IEEE Transactions on Electron Devices

Abstract:Highly sensitive and cost-effective flexible piezoresistive sensors are pursued as essential components of electronic skin (e-skin) for a variety of applications such as soft robotics and body prosthesis. A common strategy for achieving high sensitivity of these sensors is to fabricate their electrode material with complex 3-D microstructures, but manufacturing cost-effective micro-structured sensors with high reliability and reproducibility is a challenge. Herein, a robust approach for producing high-reproductive microstructured polydimethylsiloxane (PDMS) films composing the sensors is proposed, based on silicon molds with a honeycomb-like architecture fabricated rapidly and cost-effectively at a standoff distance by femtosecond laser pulses in the self-channeling regime. Single-walled carbon nanotubes (SWNTs) are embedded in the micro-structured PDMS films composing sandwich-structural flexible piezoresistive sensors. The sensing devices exhibit good performance with high sensitivity, fast response time, and excellent stability and are used with success for the detection of hand motion pressure and blood pressure at the wrist, thus showing a great potential as components of e-skin for detection of various human motions.

engineering, electrical & electronic,physics, applied
Electronic Skin from High-Throughput Fabrication of Intrinsically Stretchable Lead Zirconate Titanate Elastomer

Yiming Liu,Huanxi Zheng,Ling Zhao,Shiyuan Liu,Kuanming Yao,Dengfeng Li,Chunki Yiu,Shenghan Gao,Raudel Avila,Pakpong Chirarattananon,Lingqian Chang,Zuankai Wang,Xian Huang,Zhaoqian Xie,Zhengbao Yang,Xinge Yu

DOI: https://doi.org/10.34133/2020/1085417

IF: 11

2020-10-17

Research

Abstract:Electronic skin made of thin, soft, stretchable devices that can mimic the human skin and reconstruct the tactile sensation and perception offers great opportunities for prosthesis sensing, robotics controlling, and human-machine interfaces. Advanced materials and mechanics engineering of thin film devices has proven to be an efficient route to enable and enhance flexibility and stretchability of various electronic skins; however, the density of devices is still low owing to the limitation in existing fabrication techniques. Here, we report a high-throughput one-step process to fabricate large tactile sensing arrays with a sensor density of 25 sensors/cm 2 for electronic skin, where the sensors are based on intrinsically stretchable piezoelectric lead zirconate titanate (PZT) elastomer. The PZT elastomer sensor arrays with great uniformity and passive-driven manner enable high-resolution tactile sensing, simplify the data acquisition process, and lower the manufacturing cost. The high-throughput fabrication process provides a general platform for integrating intrinsically stretchable materials into large area, high device density soft electronics for the next-generation electronic skin.

multidisciplinary sciences
Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility

Qiuna Zhuang,Kuanming Yao,Mengge Wu,Zhuogui Lei,Fan Chen,Jiyu Li,Quanjing Mei,Yingying Zhou,Qiyao Huang,Xin Zhao,Ying Li,Xinge Yu,Zijian Zheng

DOI: https://doi.org/10.1126/sciadv.adg8602

IF: 13.6

2023-06-01

Science Advances

Abstract:Implantable bioelectronics provide unprecedented opportunities for real-time and continuous monitoring of physiological signals of living bodies. Most bioelectronics adopt thin-film substrates such as polyimide and polydimethylsiloxane that exhibit high levels of flexibility and stretchability. However, the low permeability and relatively high modulus of these thin films hamper the long-term biocompatibility. In contrast, devices fabricated on porous substrates show the advantages of high permeability but suffer from low patterning density. Here, we report a wafer-scale patternable strategy for the high-resolution fabrication of supersoft, stretchable, and permeable liquid metal microelectrodes (μLMEs). We demonstrate 2-μm patterning capability, or an ultrahigh density of ~75,500 electrodes/cm 2 , of μLME arrays on a wafer-size (diameter, 100 mm) elastic fiber mat by photolithography. We implant the μLME array as a neural interface for high spatiotemporal mapping and intervention of electrocorticography signals of living rats. The implanted μLMEs have chronic biocompatibility over a period of eight months.

multidisciplinary sciences
Spray-Coated Ultrathin and Porous Films for Physiological Sensing and Force Detection

Tang Li,Yichen Ding,Chao Teng,Yan Zheng,Xiaoliang Wang,Dongshan Zhou

DOI: https://doi.org/10.1021/acsami.4c11179

IF: 9.5

2024-10-26

ACS Applied Materials & Interfaces

Abstract:Epidermal electronics employed on human skin for the long term require good breathability and nonforeign wearing. In this work, we combine phase separation and spray coating to fabricate a porous and ultrathin electrode within minutes as well as micrometer-scale porous pressure sensors. The resulting electrodes show a water vapor transmission rate of 18.4 mg·cm^(-2)·h^(-1), sheet resistance of 5.2 Ω/sq, and thickness below 5 μm. The introduction of the biogel further reduced the electrode-skin...

materials science, multidisciplinary,nanoscience & nanotechnology
A facile and novel design of multifunctional electronic skin based on polydimethylsiloxane with micropillars for signal monitoring.

Shunbo Li,Maowen Chen,Chuanchuan Lin,K. Cai,Bailong Tao,Y. Jia,Songyue Zhang,Zengzilu Xia

DOI: https://doi.org/10.1039/d0tb00954g

2020-08-12

Abstract:Electronic skins (e-skins) with monitoring capabilities have attracted extensive attention and are being widely employed in wearable devices for medical diagnosis. In particular, e-skins based on strain sensors have been reported extensively due to their simple structure and efficient performance in collecting human physiological information. Flexible sensors with high sensitivity, simplified fabrication, and low-cost are highly desired for human signal monitoring; this work provides a novel strain-sensing e-skin with micro-structures, which is simply made of modified polydimethylsiloxane (PDMS) and silver nanowires (AgNWs). The fabricated e-skin has great sensitivity towards strain changes, and its mechanical properties and sensitivity could be regulated by varying the micro-structures. Furthermore, the e-skin demonstrated significant capacity for monitoring human body movements, temperature changes, and spatial resolution, highlighting its great potential in personalized medicine.

Medicine,Engineering,Materials Science
Facile and Rapid Method for Fabricating Liquid Metal Electrodes with Highly Precise Patterns via One‐Step Coating

Tae Hwan Park,Ju‐Hyung Kim,Soonmin Seo

DOI: https://doi.org/10.1002/adfm.202003694

IF: 19

2020-07-12

Advanced Functional Materials

Abstract:<p>Gallium‐based alloys, which are virtually non‐toxic liquid metals at room temperature, are considered highly promising electrode materials for state‐of‐the‐art electronics with new form factors. Herein, a facile and rapid method to fabricate liquid metal electrodes with highly precise patterns via a one‐step coating is presented. For this work, polymeric stencil masks with dual structures, comprising upper and lower structures for injecting and molding the liquid metal, respectively, are used for direct patterning of the liquid metal via spray deposition for few seconds, enabling the formation of complex and minute patterns including long thin lines and hollow forms. This method can be adapted to 3D substrates of various materials without any surface treatment, owing to the intrinsic adhesive and flexible properties of the polymeric masks ensuring conformal contact with non‐flat surfaces, and is also expected to be applicable to sub‐micron patterns. In addition, a number of highly flexible/stretchable electronic applications, exhibiting no change in electrical conductivity upon consecutive structural deformations, are demonstrated on various substrates including human skin. It is anticipated that these results will not only spur the further development of flexible/stretchable electronics, but also significantly contribute to the innovative on‐site fabrication of wearable electronics with high durability.</p>

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
Ultrasound Powered Wetting and Filling of Liquid Metal into Ultrafine Channels for Flexible Electronics

Xing Ma,Zirong Xu,Dongdong Jin,Sanhu Liu,Guoqiang Li,Zichang Guo,Zhengwei Li,Chengqian Xiong,Zhiwu Xu

DOI: https://doi.org/10.21203/rs.3.rs-3909065/v1

2024-01-01

Abstract:Abstract Liquid metals (LMs) that possess both metallic and fluidic properties at room temperature promise numerous benefits in flexible electronics. However, preparing fine LM circuits with complex architectures at the microscale and below poses great challenges due to large surface tension of LMs, hindering the development of flexible electronic devices with increased integration and/or complexity. Herein, we develop a facile strategy that employs ultrasonic stimulation to power the wetting and filling of LMs into non-wettable elastic microchannels for ultrafine LMs circuits fabrication. Taking advantage of ultrasound-induced asymmetrical acoustic pressure within LMs, rapid and complete filling of LMs into microchannels as fine as ~ 750 nm could be achieved within several seconds without destroying the soft substrate. Electromechanical investigations suggested that the LM-filled microchannels by ultrasound possessed excellent cyclic stability and robustness. Through ultrasonic filling and patterning ultrafine LM circuits, we created a miniaturized pressure sensor array capable of accurately sensing load pressure and spatial information. The sensitivity of the finger-wearable strain sensor was further enhanced by 22.6 times via introducing local microstructures and filling LM inside the microchannel. Finally, we demonstrated the efficient preparation of complex LM circuit patterns powered by ultrasound, e.g., integrated circuits, spiderman, and snowflake patterns with multiple interlaced branches, planar structures, blind holes as well as vertical architectures, all of which could hardly be achieved by conventional injection methods. This work presented an ultrasound-based fabrication method for versatile LMs circuits, providing a platform technology for the advancement of next-generation compact and integrated flexible electronics.
Micro Structuring Polydimethylsiloxane Elastomer Film with 3D Printed Mold for Low Cost and High Sensitivity Flexible Capacitive Pressure Sensor

Bengang Zhuo,Sujie Chen,Xiaojun Guo

DOI: https://doi.org/10.1109/edtm.2017.7947545

2017-01-01

Abstract:3D printing is used to fabricate molds for micro-structuring the polydimethylsiloxane (PDMS) film. The fabricated sensor device using the micro-structured PDMS film presents high sensitivity, excellent durability and fast response, and is also shown to perform reliable real-time wrist pulse monitoring.
Flexible e-Skin based on micro-structured PZT thin film via low-temperature PLD method

Shao-Hui Zhang,Long Zhang,Lujia Wang,Fengxia Wang,Ge-Bo Pan

DOI: https://doi.org/10.1039/c8tc06350h

IF: 6.4

2019-01-01

Journal of Materials Chemistry C

Abstract:The e-skin based on lead zirconate titanate (PZT) exhibits excellent electrical sensing performance, and it is widely used in clinical trials owing to its prominent piezoelectric, ferroelectric and pyroelectric performance. However, the complicated fabrication procedure and fatigue during long-term use still limit its application. In this study, a flexible e-skin withstanding fatigue over extended periods of use (more than 10000 cycles) was facilely constructed by combining polydimethylsiloxane (PDMS) with a highly crystalline PZT thin film. Note that the sensor was first fabricated using the micro-structured PZT thin film via a low-temperature pulsed laser deposition system (PLD) method, which could be easily combined with other processes. The sensor highlighted an ultra-high detection sensitivity (S, similar to 5.82 kPa(-1)) and almost negligible hysteresis rate or degree of hysteresis (DH, similar to 0.45%) in the pressure-sensing test. Moreover, the obtained sensor exhibited the lower limit of detection (LOD) of 30 Pa as well as a faster response (similar to 0.38 s) and release time (similar to 0.79 s). Importantly, due to the excellent performance of this sensor, various dynamic and static signals of the human body could be detected within the maximum range allowed under the septal fracture effect.
Porous Membrane‐Enabled Fast Liquid Metal Patterning in Thin Blind‐Ended Microchannels

Ronghang Wang,Lin Gui,Lunjia Zhang,Zhizhu He,Meng Gao,Sen Chen,Xuyan Zhou,Yuntao Cui,Zhongshan Deng

DOI: https://doi.org/10.1002/admt.201900256

IF: 6.8

2019-07-05

Advanced Materials Technologies

Abstract:<p>A porous membrane‐enabled fast liquid metal patterning method in thin blind‐ended microchannels is reported. The principle is to introduce a thin porous membrane in polydimethylsiloxane (PDMS) chips, effectively releasing the air pressure of the inner microchannel during the injection process. Traditional direct injection method requires microchannels with both an inlet and an outlet, making blind‐ended microchannel filling impossible. The vacuum filling requires adequate chip thickness and stiffness for the channel to recover after filling. Additionally, high injection pressure may cause leakages and damage to the microchannels. Experiment results indicate that this novel method promotes the injection in thin blind‐ended microchannels without voids and damages. The finest channel that can be filled successfully using this mechanism is with around 12 µm width and 20 µm height. Series of tensile texts for comb capacitor demonstrate that the electrodes have marvelous flexibility. Overall, the capability of filling the mazy blind‐ended channels entirely quickly makes it promising in the fast fabrication of ultrathin stretchable electronics.</p>

materials science, multidisciplinary
Introduction of a Chemical-Free Metal PDMS Thermal Bonding for Fabrication of Flexible Electrode by Metal Transfer onto PDMS

Domin Koh,Anyang Wang,Phil Schneider,Brett Bosinski,Kwang W Oh,Kwang Oh

DOI: https://doi.org/10.3390/mi8090280

IF: 3.4

2017-09-15

Micromachines

Abstract:Polydimethylsiloxane (PDMS) is a flexible and biocompatible material widely used in the fabrication of microfluidic devices, and is often studied for the fabrication of flexible electrodes. The most popular method of fabricating a flexible electrode using PDMS is done by transferring a metal electrode onto said PDMS. However, the transfer process is difficult and the transferred metal layer is easily damaged due to inherently weak adhesion forces between the metal and PDMS, thus requiring a chemical treatment or sacrificial layer between the two. The fabrication process using a chemical treatment or sacrificial layer is complicated and expensive, which is the major limitation of using PDMS in the fabrication of flexible electrodes. This paper discusses the findings of a possible solution to create strong bonding between PDMS and various metals (copper, nickel and silver) using a chemical-free metal to PDMS thermal bonding technique. This method is the same as the PDMS curing process, but with a variation in the curing condition. The condition required to create strong bonding was studied by observing copper transferred by various PDMS curing conditions, including the standard condition. The condition creating the strong bonding was baking PDMS (5:1 = base polymer: curing agent) at 150 °C for 20 min. Experimentation showed that the optimum thickness of the transferred metal shows that the optimum thickness is approximately 500 nm, which allows for a higher resistance to stresses. The successful transfer of copper, nickel and silver layers onto PDMS with a stronger adhesion force opens up many new applications dealing with the fabrication of flexible electrodes, sensors, and flexible soft magnets.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Liquid Metal‐Based Multimodal Wearable Sensor Platform Enabled by Highly Accessible Microfabrication of PDMS with Tuned Mechanical Properties

Byungjin Kim,Sangmin Lee,Jae In Kim,Dong Hyeon Lee,Bon‐Jae Koo,Seong‐Geon Kim,Seyeong Ryu,Byungchul Kim,Min‐Ho Seo,Joonsoo Jeong

DOI: https://doi.org/10.1002/admt.202400859

IF: 6.8

2024-08-18

Advanced Materials Technologies

Abstract:This study presents a highly accessible end‐to‐end fabrication approach for multifunctional skin‐mounted liquid metal (LM) sensors. The method covers analytic modeling, MEMS‐free simple microfabrication, funnel‐assisted LM filling, and sealing for electrical interfaces. These sensors feature robust interconnections, high stretchability, and cost‐effective production, expanding the accessibility of personalized healthcare devices. The seamless integration of wearable devices into user‐friendly and cost‐effective healthcare systems requires constituent materials with high degrees of flexibility, stretchability, and adhesive properties without compromising performance during dynamic body movements. This study proposes a liquid metal (LM)‐based multimodal skin‐mountable sensor platform using polydimethylsiloxane tuned for enhanced stretchability and stickiness (sPDMS) to fully leverage the LM's deformability. A highly accessible end‐to‐end fabrication approach is proposed for multifunctional LM sensors from modeling to fabrication and packaging, all achieved without the need for cleanroom facilities or special equipment. The LM‐based facile fabrication process tailored for sPDMS enables an adhesive‐free sensor patch with microfluidic channels of 100 μm width and stretchability up to 100%. A new analytical model provides enhanced estimation on the electromechanical behavior of LM channels compared with existing models. The funnel‐assisted LM filling and tape‐based channel sealing methods enable simple packaging of LM channels with robust external interconnection and direct skin‐interfaced monitoring. The feasibility of this healthcare platform is demonstrated through a multimodal sensor patch with electromechanical and electrophysiological functionalities. The proposed technology addresses current challenges in the cost and complexity of microfabrication, expanding the boundaries of wearable devices for highly accessible and personalized healthcare devices.

materials science, multidisciplinary
Hollow MXene Sphere-Based Flexible E-Skin for Multiplex Tactile Detection

Xue-Feng Zhao,Xiao-Hong Wen,Shu-Lin Zhong,Meng-Yang Liu,Yu-Hang Liu,Xue-Bin Yu,Ru-Guang Ma,David Wei Zhang,Jia-Cheng Wang,Hong-Liang Lu

DOI: https://doi.org/10.1021/acsami.1c06993

2021-09-14

Abstract:Skin-like electronics that can provide comprehensively tactile sensing is required for applications such as soft robotics, health monitoring, medical treatment, and human–machine interfaces. In particular, the capacity to monitor the contact parameters such as the magnitude, direction, and contact location of external forces is crucial for skin-like tactile sensing devices. Herein, a flexible electronic skin which can measure and discriminate the contact parameters in real time is designed. It is fabricated by integrating the three-dimensional (3D) hollow MXene spheres/Ag NW hybrid nanocomposite-based embedded stretchable electrodes and T-ZnOw/PDMS film-based capacitive pressure sensors. To the best of our knowledge, it is the first stretchable electrode to utilize the 3D hollow MXene spheres with the essential characteristic, which can effectively avoid the drawbacks of stress concentration and shedding of the conductive layer. The strain-resistance module and the pressure-capacitance module show the excellent sensing performance in stability and response time, respectively. Moreover, a 6 × 6 sensor array is used as a demonstration to prove that it can realize the multiplex detection of random external force stimuli without mutual interference, illustrating its potential applications in biomimetic soft wearable devices, object recognition, and robotic manipulation.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsami.1c06993.Surface roughness of the T-ZnOw/PDMS film and pure PDMS film (AVI)Structural stability of the 3D hollow MXene spheres/Ag NWs/PDMS-based embedded stretchable electrodes (MP4)SEM images of positively charged PS spheres, self-assembly 3D hollow MXene spheres, Ag NWs, and 3D hollow MXene spheres/Ag NWs/PDMS hybrid conductive layer; TEM of 3D hollow MXene spheres; EDS of 3D hollow MXene spheres/Ag NWs/PDMS-based embedded stretchable electrodes; AFM image of the 3D hollow MXene spheres/Ag NWs/PDMS hybrid conductive layer; conductivity stability of the embedded stretchable electrodes based on the hollow MXene spheres/Ag NW hybrid nanocomposite; schematic diagram of the T-ZnOw/PDMS film preparation process; schematic diagram of the action mechanism of the silane-coupling agent KH570; characterizations of the T-ZnOw and T-ZnOw/PDMS film; comparison results of FTIR between untreated T-ZnOw and KH570-treated T-ZnOw; 3D roughness image of the T-ZnOw/PDMS film; graphical explanation of capacitive pressure sensors based on T-ZnOw/PDMS and PDMS; T-ZnOw/PDMS film exhibiting superhydrophobicity, where the contact angle of the water droplet is 151°; comparison of hydrophobicity with 2000 bending cycles; comparison of hydrophobicity with different r; relative capacitance changes of the capacitive pressure sensor; and change of capacitance attributed to the interaction of plate spacing and the dielectric constant Δε (PDF)This article has not yet been cited by other publications.

materials science, multidisciplinary,nanoscience & nanotechnology
Scalable Processing Ultrathin Polymer Dielectric Films with a Generic Solution Based Approach for Wearable Soft Electronics

Sujie Chen,Sai Peng,Wenjian Sun,Guoying Gu,Qing Zhang,Xiaojun Guo

DOI: https://doi.org/10.1002/admt.201800681

IF: 6.8

2019-01-01

Advanced Materials Technologies

Abstract:Wearable intelligence on human body requires light and soft electronics built on ultrathin supporting films. It would be ideal to have a generic and scalable approach for processing such ultrathin electronics based on various materials to accommodate different design requirements. In this work, a solution based delamination approach is developed using sodium hydroxide (NaOH) treated cross-linked polymethylmethacrylate (c-PMMA) film as the separation layer to process ultrathin polymer films. The c-PMMA layer has resistance to various solvents for coating different polymer materials on top. Reaction of the c-PMMA surface with mixture of NaOH and water reduces adhesion between the polymer film and the carrier substrate. The polymer film is thus able to be delaminated with facile processes. The approach is applied to fabricate ultrathin flexible or stretchable transparent conductive films, and resistive strain sensors using different polymer materials. A new wrinkle structure capacitive pressure sensor is also realized by integrating different ultrathin polymer films, and presents higher or comparable sensitivity (2.76 kPa(-1)) compared to previous work but with a much lighter weight (<60 g m(-2)). Wearable systems using these sensors are finally built for real time measuring wrist pulse waves, and controlling all actions of a shooting computer game with only three fingers.

Fabrication of a thin PDMS film with complex liquid metal electrodes embedded and its application as skin sensors

Implantable Wet‐Adhesive Flexible Electronics with Ultrathin Gelatin Film

Fabrication of High-Resolution Flexible Circuits and Sensors Based on Liquid Metal Inks by Spraying and Wiping Processing.

A multifunctional electronic skin based on patterned metal films for tactile sensing with a broad linear response range

Ultrathin Epidermal P(VDF-TrFE) Piezoelectric Film for Wearable Electronics

Flexible Microcircuit of a Liquid Metal Deposit Layer

Flexible microcircuit of liquid metal deposit layer

Piezoresistive Electronic-Skin Sensors Produced With Self-Channeling Laser Microstructured Silicon Molds

Electronic Skin from High-Throughput Fabrication of Intrinsically Stretchable Lead Zirconate Titanate Elastomer

Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility

Spray-Coated Ultrathin and Porous Films for Physiological Sensing and Force Detection

A facile and novel design of multifunctional electronic skin based on polydimethylsiloxane with micropillars for signal monitoring.

Facile and Rapid Method for Fabricating Liquid Metal Electrodes with Highly Precise Patterns via One‐Step Coating

Ultrasound Powered Wetting and Filling of Liquid Metal into Ultrafine Channels for Flexible Electronics

Micro Structuring Polydimethylsiloxane Elastomer Film with 3D Printed Mold for Low Cost and High Sensitivity Flexible Capacitive Pressure Sensor

Flexible e-Skin based on micro-structured PZT thin film via low-temperature PLD method

Porous Membrane‐Enabled Fast Liquid Metal Patterning in Thin Blind‐Ended Microchannels

Introduction of a Chemical-Free Metal PDMS Thermal Bonding for Fabrication of Flexible Electrode by Metal Transfer onto PDMS

Liquid Metal‐Based Multimodal Wearable Sensor Platform Enabled by Highly Accessible Microfabrication of PDMS with Tuned Mechanical Properties

Hollow MXene Sphere-Based Flexible E-Skin for Multiplex Tactile Detection

Scalable Processing Ultrathin Polymer Dielectric Films with a Generic Solution Based Approach for Wearable Soft Electronics