Development of Flexible Piezoelectric Hair-Like Dual-Mode Sensor for Detection of Airflow and Acoustic Particle Velocity

Biao Jin,Hongchao Cao,Tianyu Sheng,Qipei He,Yansong Gai,Yonggang Jiang
2023-01-01
Abstract:This paper presents a highly sensitive flexible piezoelectric hair-like dual-mode sensor for the detection of airflow and acoustic particle velocity. The sensor was fabricated by a novel stress-induced self-bending process using flexible polyimide (PI) and lead zirconate titanate (PZT). The performance of the hair-like dual-mode sensor was evaluated with alternating wind speed and pulsed sound source. The wind speed detection threshold is 0.07 m/s, and the sensitivity to acoustic particle velocity is 0.087 mV/(mm/s) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> with a resolution of 4.04 mm/s. Compared to the non-resonant state, the sensitivity at resonance (1409 Hz) is increased by 23 times. The bionic flexible airflow and acoustic particle velocity sensor provides a new method for multi-signal measurements in complex scenes.
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