A Composite High-Speed and High-Precision Positioning Approach for Dual-Drive Gantry Stage

Weichao Sun,Jianing Liu,Huijun Gao
DOI: https://doi.org/10.1109/tase.2024.3380646
IF: 6.636
2024-01-01
IEEE Transactions on Automation Science and Engineering
Abstract:As an important part of the motion system in high-end manufacturing equipment, dual-drive gantry stage urgently requires higher performance. Planar rapid positioning is a classical application of the gantry stage, while unmodeled dynamics, coupled dynamics of mechanism, and conflict between rapidity and precision bring many difficulties into controller design. In this article, a coupled dynamic model is established and transformed for positioning to provide better guidance for controller design under the rotation mode of the cross beam. A composite positioning control method consisting of a high-speed moving section and a high-precision positioning section is proposed for linearmotors on the gantry to achieve both fast response and precise control simultaneously. In addition, a synchronization scheme is proposed for the dual-driven cross beam with coupled dynamics to enhance the positioning precision of the workbench and balance of the beam. Experiments are conducted on the X -axis with one linearmotor for the composite positioning method and Y -axis with two linearmotors for the synchronization scheme combined with the composite positioning control separately, through which the effectiveness and validity of the proposed method are verified.
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