Abstract:Plasmonic nanoscale devices/structures have gained more attention from researchers due to their promising functions and/or applications. One important technical focus on this rapidly growing optical device technology is how to precisely control and fabricate nanostructures for different functions or applications (i.e., patterning end points should locate at/near the interface while fabricating these plasmonic nanostructures), which needs a systematic methodology for nanoscale machining, patterning, and fabrication when using the versatile nanoprecision tool focused ion beam (FIB), that is, the FIB-assisted interface detection for fabricating functional plasmonic nanostructures. Accordingly, in this work, the FIB-assisted interface detection was proposed and then successfully carried out using the sample-absorbed current as the detection signal, and the real-time patterning depth control for plasmonic structure fabrication was achieved via controlling machining time. Besides, quantitative models for the sample-absorbed currents and the ion beam current were also established. In addition, some nanostructures for localized surface plasmon resonance biosensing applications were developed based on the proposed interface detection methodology for FIB nanofabrication of functional plasmonic nanostructures. It was shown that the achieved methodology can be conveniently used for real-time control and precise fabrication of different functional plasmonic nanostructures with different geometries and dimensions.

Geometrical Characterization Issues of Plasmonic Nanostructures with Depth-Tuned Grooves for Beam Shaping

Design of Off-angle Beaming Device Based on Subwavelength Metal Thin Film Microstructure

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Investigation of propagation properties of plasmonic nanostructures with nonparaxial Gaussian beam illumination

Beaming of light through depth-tuned plasmonic nanostructures

An Improved Surface-Plasmonic Nanobeam Cavity for Higher Q and Smaller V

Experimental Study of Plasmonic Structures with Variant Periods for Sub-Wavelength Focusing: Analyses of Characterization Errors

A Practical V-Shaped Nano-Aperture Flanked with Surface Corrugations for Beam Focusing

Influence of V-Shaped Plasmonic Nanostructures on Beam Propagation

Non-perfectly-matched In-Plane Diffractions for Generation of Plasmonic Airy Beam

A Simple Method for Generating Unidirectional Surface Plasmon Polariton Beams with Arbitrary Profiles.

Dielectric Meta-Walls for Surface Plasmon Focusing and Bessel Beam Generation

Plasmonic Focusing of Infrared SNOM Tip Patterned with Asymmetric Structures

Focusing Characteristics Optimization of Composite Near-Field Fiber Probe Based on Surface Plasmon

Monitoring the surface quality of silver plasmon waveguides with nonlinear photoemission electron microscopy and in-situ ion sputtering

Sub-one-third wavelength focusing of surface plasmon polaritons excited by linearly polarized light.

Design and characterization of a micronfocusing plasmonic device

Enhancement of Surface Plasmon Polariton Excitation Via Feedback-Based Wavefront Shaping.

Gap plasmon resonator arrays for unidirectional launching and shaping of surface plasmon polaritons

Groove-structured metasurfaces for modulation of surface plasmon propagation

A Flat-Based Plasmonic Fiber Probe for Nanoimaging