Abstract:Phase Measuring Deflectometry (PMD) with high dynamic range and high robustness is a more powerful method to achieve the integration of optical components fabrication and testing, which would avoid the secondary positioning error caused by the removal of optical components in off-line status. However, for surface shape measurement of transparent element, the captured fringe patterns are superposition of the patterns reflected from the front and rear surfaces, leading to the failure of the traditional phase-shifting algorithm to extract the true phase distribution. In order to separate the superposed fringe patterns, the limitations of the existing methods such as UV deflectometry and polarized light deflectometry, which require special light source and polarizer filter, are expensive instrument and complex processes. Moreover, only the front surface shape can be reconstructed at a time, which lowers the efficiency of the measurement. To achieve in-situ measurement of the front and rear surface shapes of the transparent element simultaneously, the combination of PMD and power spectrum estimation is used to separate parasitic fringe patterns. And the front and rear surface shapes are reconstructed using ray tracing and non-linear optimization. The feasibility of the proposed method is demonstrated by numerical simulation. In the experiment, the transparent element with a thickness of about 10 mm is detected and the front and rear surface shapes are reconstructed. The front and rear surface shapes differences of the transparent element with a diameter of 77.8 mm are 173 nm in RMS and 212 nm in RMS, respectively.

Optimization of Adaptive Digital Fringe Method in PMD

Selection of Phase-Recovery Algorithms for Fringe Processing in Optical Measurement of Micro-Surface

Phase calculation of smooth surface with multi-reflectivity based on phase measurement deflectometry.

Phase Error Analysis and Reduction in Phase Measuring Deflectometry

Elimination of Parasitic Reflections for Objects with High Transparency in Phase Measuring Deflectometry

High-precision Measurement of Low Reflectivity Specular Object Based on Phase Measuring Deflectometry

A Dual-Frequency Online PMP Method with Phase-Shifting Parallel to Moving Direction of Measured Object

Reduction of Phase Error Caused by Overexposure in Phase Measurement Profilometry

Study on Eliminating the Effect of Parasitic Reflection on Deflectometry Measurement of Planar Optical Element Surface Figure

Adaptive Phase Correction For Phase Measuring Deflectometry Based On Light Field Modulation

Fast and Accurate Deflectometry with Crossed Fringes

Study on Bi-Color Phase Measurement Deflectometry

Three-Dimensional Shape Measurements of Specular Objects Using Phase-Measuring Deflectometry.

In-situ Testing of Front and Rear Surfaces of Transparent Element

A brief review of the technological advancements of phase measuring deflectometry

Surface Shape Measurement of Transparent Planar Elements with Phase Measuring Deflectometry

Front and Back Surface Measurement of the Transparent Planar Element Based on Multi-Frequency Fringe Deflectometry

On-line Three-Dimensional Inspection Using Randomly Phase-Shifting Fringe Based on Least-Square Iteration

A Novel One-Dimensional Phase-Shift Technique by Using Crossed Fringe for Phase Measuring Deflectometry

Carrier Frequency Removal In Phase Measuring Deflectometry With Non-Telecentric Imaging

3D shape measurement of discontinuous specular objects based on advanced PMD with bi-telecentric lens.