MEMS-based Ultrasonic Transducer As the Receiver for Wireless Power Supply of the Implantable Microdevices

Qing He,Jingquan Liu,Bin Yang,Xingzhao Wang,Xiang Chen,Chunsheng Yang

DOI: https://doi.org/10.1016/j.sna.2014.07.008

2014-01-01

Abstract:This paper investigates a wireless power supply for implantable devices with a MEMS-based ultrasonic transducer. The transducer employs a piezoelectric thick film prepared by bonding and thinning technologies. A continuous ultrasound wave of 40.43 kHz is transmitted in two media: water and biological tissue. This transmitted power is received by a MEMS transducer, demonstrating a peak power transfer of 35 μW under the sound energy density of 3.7 × 10−9 J/cm3 at a reception distance of 20 mm in a water tank, and a peak power of 49 μW under the sound energy density of 1.25 × 10−8 J/cm3 at a reception distance of 22 mm in a pig hind leg tissue. The pressure sensitivity of this device is about 0.296 mV/Pa in the frequency of 40.43 kHz. In a progressive field, the energy density of 3.7 × 10−9 J/cm3 and 1.25 × 10−8 J/cm3 would be achieved at the intensity of 589.3 μW/cm2 and 1.2 mW/cm2, which are both below the FDA safety limit. The output power of the device under situations of misalignment at various reception angles is also discussed in detail based on experimental results.