ChemInform Abstract: Theoretical Understanding of the Reaction Mechanism of SiO2Atomic Layer Deposition
Guoyong Fang,Lina Xu,Jing Ma,Aidong Li
DOI: https://doi.org/10.1002/chin.201616205
2016-01-01
ChemInform
Abstract:ChemInformVolume 47, Issue 16 Reviews ChemInform Abstract: Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition Guoyong Fang, Guoyong Fang Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this authorLina Xu, Lina Xu Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this authorJing Ma, Jing Ma Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this authorAidong Li, Aidong Li Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this author Guoyong Fang, Guoyong Fang Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this authorLina Xu, Lina Xu Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this authorJing Ma, Jing Ma Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this authorAidong Li, Aidong Li Coll. Chem. Mater. Eng., Wenzhou Univ., Wenzhou, Zhejiang 325035, Peop. Rep. ChinaSearch for more papers by this author First published: 29 March 2016 https://doi.org/10.1002/chin.201616205Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onEmailFacebookTwitterLinkedInRedditWechat Abstract Review: 73 refs. References Guoyong Fang, Lina Xu, Jing Ma, Aidong Li, Theoretical Understanding of the Reaction Mechanism of SiO2 Atomic Layer Deposition, Chem. Mater., 2016, 28, 1247–1255. DOI: 10.1021/acs.chemmater.5b04422; 10.1021/acs.chemmater.5b04422 CASWeb of Science®Google Scholar Volume47, Issue16March, 2016 ReferencesRelatedInformation